Design and Performance of a J Band MEMS Switch

被引：5

作者：

Zhang, Naibo ^{[1
]}

Yan, Ze ^{[2
]}

Song, Ruiliang ^{[1
]}

Wang, Chunting ^{[1
]}

Guo, Qiuquan ^{[3
]}

Yang, Jun ^{[3
]}

机构：

[1] China Elect Sci & Technol Grp Corp, Res Inst 54, Beijing 100070, Peoples R China

[2] Beihang Univ, Beijing 100083, Peoples R China

[3] Univ Western Ontario, Dept Mech & Mat Engn, London, ON N6A 3K7, Canada

来源：

MICROMACHINES | 2019年 / 10卷 / 07期

基金：

中国国家自然科学基金;

关键词：

J band; MEMS; switch;

D O I：

10.3390/mi10070467

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper presents a novel J band (220-325 GHz) MEMS switch design. The equivalent circuits, the major parameters, capacitance, inductance and resistance in the circuit were extracted and calculated quantitatively to carry out the radio frequency analysis. In addition, the mechanical property of the switch structure is analyzed, and the switching voltage is obtained. With the designed parameters, the MEMS switch is fabricated. The measurement results are in good agreement with simulation results, and the switch is actuated under a voltage of similar to 30 V. More importantly, the switch has achieved a low insertion loss of similar to 1.2 dB at 220 GHz and <similar to 4 dB from 220 GHz to 270 GHz in the "UP" state, and isolation of similar to 16 dB from 220 GHz to 320 GHz in the "DOWN" state. Such switch shows great potential in the integration for terahertz components.

引用

页数：9

共 16 条

[11] Surface-Micromachined Capacitive RF Switches With Low Actuation Voltage and Steady Contact
Shekhar, Sudhanshu
Vinoy, K. J.
Ananthasuresh, G. K.
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2017, 26 (03) : 643 - 652
[12] D-Band RF-MEMS SPDT Switch in a 0.13 μm SiGe BiCMOS Technology
Wipf, Selin Tolunay
Goeritz, Alexander
Wietstruck, Matthias
Wipf, Christian
Tillack, Bernd
Kaynak, Mehmet
[J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2016, 26 (12) : 1002 - 1004
[13] Ying Du, 2015, 2015 IEEE Sensors. Proceedings, P1, DOI 10.1109/ICSENS.2015.7370272
[14] Yukang Feng, 2017, 2017 IEEE MTT-S International Microwave Symposium (IMS), P1095, DOI 10.1109/MWSYM.2017.8058786
[15] A Fixed Miniaturization 90° Phase Shifter for VHF-Band High-Power Applications
Zhang, Naibo
Wang, Chunting
Lang, Lei
Huang, Jianming
[J]. IEEE ACCESS, 2019, 7 : 34395 - 34402
[16] CPW Tunable Band-Stop Filter Using Hybrid Resonator and Employing RF MEMS Capacitors
Zhang, Naibo
Deng, Zhongliang
Sen, Fan
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (08) : 2648 - 2655

← 1 2 →