Modeling and simulation of the lag effect in a deep reactive ion etching process

This paper presents research on modeling and simulation of the lag effect, which is one of the most important effects in a deep reactive ion etching (DRIE) process. From theoretical analysis and experimental investigation of the lag effect, it has been found that the shielding effect and flow change of reactive ions are two dominant factors. Based on our previous work on DRIE modeling, a modified model considering these two lag effect factors has been established, and a 2D DRIE simulator is developed according to this model. The simulation results were in good agreement with experiments.