High reflectivity high-Q micromechanical Bragg mirror

被引：29
|
作者：
Boehm, H. R.
Gigan, S.
Blaser, F.
Zeilinger, A.
Aspelmeyer, M.
Langer, G.
Baeuerle, D.
Hertzberg, J. B.
Schwab, K. C.
机构：
[1] Univ Vienna, Fac Phys, A-1090 Vienna, Austria
[2] Austrian Acad Sci, IQOQI, A-1090 Vienna, Austria
[3] Johannes Kepler Univ, Inst Appl Phys, A-4040 Linz, Austria
[4] Univ Maryland, Dept Phys, College Pk, MD 20740 USA
[5] Univ Maryland, Lab Phys Sci, College Pk, MD 20740 USA
来源：
APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 22期
基金：
奥地利科学基金会;
关键词：
D O I：
10.1063/1.2393000
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 10(4). Using this micromirror in a Fabry-Perot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.
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页数：3
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