Highly periodic Au nano-disc arrays for plasmon-resonant SERS structures on fused silica using UV-NIL based double-layer lift-off process

被引：9

作者：

Barnett, J. ^{[1
]}

Plachetka, U. ^{[1
]}

Nowak, C. ^{[1
]}

Wackerbarth, H. ^{[2
]}

机构：

[1] AMO GmbH, Otto Blumenthal Str 25, D-52074 Aachen, Germany

[2] Laser Lab Gottingen eV, Hans Adolf Krebs Weg 1, D-37077 Gottingen, Germany

来源：

MICROELECTRONIC ENGINEERING | 2017年 / 172卷

关键词：

Surface-enhanced Raman spectroscopy; Plasmonics; Au nano-disc; Nanoimprint lithography; Lift-off; Explosive detection; ENHANCED RAMAN-SCATTERING; GOLD;

D O I：

10.1016/j.mee.2017.02.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Au nanostructures of different types are widely employed as substrates for surface-enhanced Raman spectroscopy (SERS) due to their strong plasmon-related near-field enhancement in the visible and NIR frequency range as well as their potential for biologically active interfaces. We report on a fabrication route for highly periodic Au nano-discs by combination of laser interference lithography (LIL) with nanoimprint lithography (NIL) using a double-layer lift-off process to produce extremely homogenous periodic arrays over areas of 6 '' wafer scale with sufficiently sharp plasmonic resonance. FDTD simulations were done to yield specifically designed plasmonic activity at a wavelength of 785 nm commonly used in Raman spectrometers. Optical characterisation of the resulting samples was compared to simulation predictions and linked to SERS signal intensity and reproducibility. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：45 / 48

页数：4

共 17 条

[1]

[Anonymous], 2005, Raman spectroscopy for chemical analysis M

[2] Homogeneous surface-enhanced Raman scattering observed from self-assembled gold nanoparticle films deposited from the liquid-liquid interface [J].

Balmes, O ;

Bovin, JO ;

Malm, JO ;

Xu, HX .

VIBRATIONAL SPECTROSCOPY, 2005, 37 (02) :189-193

[3] Gold nanoparticles by soft UV nanoimprint lithography coupled to a lift-off process for plasmonic sensing of antibodies [J].

Barbillon, G. ;

Hamouda, F. ;

Held, S. ;

Gogol, P. ;

Bartenlian, B. .

MICROELECTRONIC ENGINEERING, 2010, 87 (5-8) :1001-1004

[4] Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography [J].

Chen, Jing ;

Shi, Jian ;

Decanini, Dominique ;

Cambril, Edmond ;

Chen, Yong ;

Haghiri-Gosnet, Anne-Marie .

MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) :632-635

[5] Raman spectra of amino acids and related compounds II Guanidine and urea derivatives [J].

Edsall, JT .

JOURNAL OF PHYSICAL CHEMISTRY, 1937, 41 (01) :133-141

[6] Metallic Adhesion Layer Induced Plasmon Damping and Molecular Linker as a Nondamping Alternative [J].

Habteyes, Terefe G. ;

Dhuey, Scott ;

Wood, Erin ;

Gargas, Daniel ;

Cabrini, Stefano ;

Schuck, P. James ;

Alivisatos, A. Paul ;

Leone, Stephen R. .

ACS NANO, 2012, 6 (06) :5702-5709

[7] Single molecule detection using surface-enhanced Raman scattering (SERS) [J].

Kneipp, K ;

Wang, Y ;

Kneipp, H ;

Perelman, LT ;

Itzkan, I ;

Dasari, R ;

Feld, MS .

PHYSICAL REVIEW LETTERS, 1997, 78 (09) :1667-1670

[8] Highly Uniform and Reproducible Surface Enhanced Raman Scattering on Air-stable Metallic Glassy Nanowire Array [J].

Liu, Xue ;

Shao, Yang ;

Tang, Yao ;

Yao, Ke-Fu .

SCIENTIFIC REPORTS, 2014, 4

[9]

Madsen S.J., 2015, MICROSC MICROANAL, V21, P2055

[10]

Maier S.A., 2007, PLASMONICS FUNDAMENT

← 1 2 →