Synthesis of functional nanoassemblies in reactive plasmas

被引：72

作者：

Ostrikov, K. ^{[1
]}

Long, J. D.

Rutkevych, P. P.

Xu, S.

机构：

[1] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[2] Nanyang Technol Univ, NIE, Plasma Sources & Appl Ctr, Singapore 637616, Singapore

来源：

VACUUM | 2006年 / 80卷 / 11-12期

关键词：

nanoassembly; deterministic nanofabrication; PECVD; reactive plasma; nano; and biomaterials;

D O I：

10.1016/j.vacuum.2006.01.025

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Synthesis of various functional nanoassemblies, by using a combination of low-pressure reactive plasma-enhanced chemical deposition and plasma-assisted rf magnetron sputtering deposition is reported. This paper details how selective generation and manipulation of the required building blocks and management of unwanted nanoparticle contaminants, can be used for plasma-aided nanofabrication of carbon nanotip microemitter structures, ultra-high aspect ratio semiconductor nanowires, ordered quantum dot arrays, and microporous hydroxyapatite bioceramics. Emerging challenges of the plasma-aided synthesis of functional nanofilms and nanoassemblies are also discussed. (c) 2006 Elsevier Ltd. All rights reserved.

引用

页码：1126 / 1131

页数：6

共 15 条

[1]

CUA HL, 2004, P 2 INT C NAN NAN 25

[2] Charged clusters in thin film growth [J].