The Influence of High-Frequency Discharge on Substrate Temperature during Film Deposition

被引：1

作者：

Shirokov, V. B. ^{[1
,2
]}

Zinchenko, S. P. ^{[1
,2
]}

机构：

[1] Russian Acad Sci, Southern Res Ctr, Rostov Na Donu 344006, Russia

[2] Southern Fed Univ, Rostov Na Donu 344006, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2019年 / 45卷 / 05期

关键词：

D O I：

10.1134/S1063785019050316

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The process of discharge-induced substrate heating at the initial stage of film synthesis by method of high-frequency cathode sputter deposition has been studied. The temperature to which the substrate was heated after the discharge switch-on was determined using the optical interferometry technique. In a working regime of barium strontium titanate film deposition onto a magnesium oxide substrate, the substrate temperature exceeded 1000 degrees C.

引用

页码：478 / 480

页数：3

共 9 条

[1]

Born M., 2002, PRINCIPLES OPTICS

[2] High-temperature thermal expansion of lime, periclase, corundum and spinel [J].

Fiquet, G ;

Richet, P ;

Montagnac, G .

PHYSICS AND CHEMISTRY OF MINERALS, 1999, 27 (02) :103-111

[3] Tailoring Lattice Strain and Ferroelectric Polarization of Epitaxial BaTiO3 Thin Films on Si(001) [J].

Lyu, Jike ;

Fina, Ignasi ;

Solanas, Raul ;

Fontcuberta, Josep ;

Sanchez, Florencio .

SCIENTIFIC REPORTS, 2018, 8

[4] Effect of Growth Mechanisms on the Deformation of a Unit Cell and Polarization Reversal in Barium-Strontium Titanate Heterostructures on Magnesium Oxide [J].

Mukhortov, V. M. ;

Golovko, Yu. I. ;

Biryukov, S. V. ;

Anokhin, A. ;

Yuzyuk, Yu. I. .

TECHNICAL PHYSICS, 2016, 61 (01) :91-96

[5]

Mukhortov V. M., 2008, HETEROSTRUCTURES BAS

[6] Elastic strain engineering of ferroic oxides [J].

Schlom, Darrell G. ;

Chen, Long-Qing ;

Fennie, Craig J. ;

Gopalan, Venkatraman ;

Muller, David A. ;

Pan, Xiaoqing ;

Ramesh, Ramamoorthy ;

Uecker, Reinhard .

MRS BULLETIN, 2014, 39 (02) :118-130

[7] Phenomenological description of phase transitions in thin BaTiO3 films [J].

Shirokov, V. B. ;

Yuzyuk, Yu. I. ;

Dkhil, B. ;

Lemanov, V. V. .

PHYSICS OF THE SOLID STATE, 2008, 50 (05) :928-936

[8] THEORY OF TEMPERATURE DERIVATIVE OF REFRACTIVE-INDEX IN TRANSPARENT CRYSTALS [J].

TSAY, YF ;

BENDOW, B ;

MITRA, SS .

PHYSICAL REVIEW B, 1973, 8 (06) :2688-2696

[9] In situ optical control of the synthesis of nanodimensional lead titanate zirconate films in a gas discharge chamber [J].

Zinchenko S.P. ;

Kovtun A.P. ;

Tolmachev G.N. .

Nanotechnologies in Russia, 2010, 5 (5-6) :328-332

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