Field electron emission characteristics of diamond films with different grain morphologies

被引:15
作者
Lu, X.
Yang, Q.
Chen, W.
Xiao, C.
Hirose, A.
机构
[1] Univ Saskatchewan, Plasma Phys Lab, Saskatoon, SK S7N 5E2, Canada
[2] Univ Saskatchewan, Dept Mech Engn, Saskatoon, SK S7N 5A9, Canada
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2006年 / 24卷 / 06期
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1116/1.2362742
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Diamond films with different grain morphologies were prepared in order to compare their field electron emission properties. For the diamond films with well-oriented grains, the field electron emission properties are enhanced when the grain shape changes from flat to flattened pyramid and then to pyramid due to the increase in the field enhancement factors. Compared with the well-oriented diamond films, the diamond film with randomly oriented grains exhibits larger emission current due, to the increase in the effective emission area. For the diamond film with cauliflowerlike grains, the nanotip structures improve the electron emission properties significantly through an increase in both the field enhancement factor and the effective emission area. (c) 2006 American Vacuum Society.
引用
收藏
页码:2575 / 2580
页数:6
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