Polishing mechanism of mechano-chemical and chemical-mechanical polishing

被引：0

作者：

Watanabe, J

机构：

来源：

关键词：

mechano-chemical polishing; chemical-mechanical polishing; mechanism; silicon crystal; silica;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：749 / 754

页数：6

共 9 条

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[4]

IZUMITANI T, 1986, AIP TRANSLATION SERI, P91

[5] INDENTATION FRACTURE - PRINCIPLES AND APPLICATIONS [J].

LAWN, B ;

WILSHAW, R .

[6]

MENDEL E, 1967, SEMICOND PROD SOLID, V10, P27

[7]

NOGAMI M, 1984, PHYS CHEM GLASSES, V25, P82

PIETSCH, GJ ;

CHABAL, YJ ;

HIGASHI, GS .

[9]

Preston F.W., 1927, J SOC GLASS TECHNOLO, V11, P214