Synthesis and characterisation of metal suboxides for gas sensors

被引：35

作者：

Calderer, J

Molinàs, P

Sueiras, J

Llobet, E

Vilanova, X

Correig, X

Masana, F

Rodríguez, A

机构：

[1] Univ Politecn Catalunya, Dept Elect Engn, ES-08034 Barcelona, Spain

[2] Univ Rovira & Virgili, Dept Engn Quim, Tarragona 43006, Spain

[3] Univ Rovira & Virgili, Dept Elect Engn, Tarragona 43006, Spain

来源：

MICROELECTRONICS RELIABILITY | 2000年 / 40卷 / 4-5期

关键词：

D O I：

10.1016/S0026-2714(99)00306-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Deposition of tin monoxide thin films by reactive magnetron sputtering is investigated. The analysis by XRD and XPS have proved the presence of SnO as the main compound in the layers, which also contain SnO2 and metallic Sn. A set of process parameters for the obtention of these films is found. The material, used as sensitive layer in resistive type gas sensor, shows an increase in its resistivity when exposed to vapours of ethanol (p-type conductivity). (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：807 / 810

页数：4

共 8 条

[1] CALDERER J, 1999, TIN MONOXIDE MAT RES
[2] ELECTRONIC-STRUCTURE OF TIN OXIDES - HIGH-RESOLUTION STUDY OF XPS AND AUGER-SPECTRA
KOVER, L
KOVACS, Z
SANJINES, R
MORETTI, G
CSERNY, I
MARGARITONDO, G
PALINKAS, J
ADACHI, H
[J]. SURFACE AND INTERFACE ANALYSIS, 1995, 23 (7-8) : 461 - 466
[3] LUMPE U, 1996, SENSORS, V2, P3
[4] OTHMER K, 1969, ENCY CHEM TECHNOLOGY, V20, P314
[5] PEARCE TC, 1998, SENSORS, V3, P62
[6] Theory and experiments on r.f. sputtered tin oxide thin-films for gas sensing applications
Tang, ZN
Jiang, GP
Chan, PCH
Sin, JKO
Lau, SS
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1997, 43 (1-3) : 161 - 164
[7] VANCU A, 1992, THIN FILM GAS SENSOR, P456
[8] [No title captured]

← 1 →