共 15 条
Laser-assisted metal deposition from CuSO4-based electrolyte solution
被引:18
作者:

Manshina, A.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Povolotskiy, A.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Ivanova, T.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Kurochkin, A.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Tver'yanovich, Yu.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Kim, D.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Kim, M.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia

Kwon, S. C.
论文数: 0 引用数: 0
h-index: 0
机构: St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia
机构:
[1] St Petersburg State Univ, Laser Res Inst, St Petersburg 198504, Russia
[2] Korea Inst Machinery & Mat, Chang Won, Kyeongnam, South Korea
关键词:
Cu deposition;
liquid-phase precursor;
electrolyte solution;
laser-induced electrolyte plating;
D O I:
10.1002/lapl.200610090
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
The copper spots were precipitated on the SiO2 substrates with Laser-induced Chemical Liquid phase Deposition (LCLD) method. The focused beam of the CW Ar+ laser generated in the multiwave regime was used for the metal precipitation. The deposition process was initiated by a laser-assisted photothermal chemical reaction, which results in the reduction of the metal complexes to the metal. To minimize the negative influence of the bubbles formation phenomenon the "substrate-side" geometry of the metal deposition has been suggested. The dependence of the metal precipitation process on the laser power and the deposition time was studied. Laser power 240 mW was found to be the threshold value for the metal deposition from the CUSO4-based electrolyte solution at the temperature 298 K.
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页码:163 / 167
页数:5
相关论文
共 15 条
[1]
METAL-DEPOSITION AT 532-NM USING A LASER TRANSFER TECHNIQUE
[J].
BOHANDY, J
;
KIM, BF
;
ADRIAN, FJ
;
JETTE, AN
.
JOURNAL OF APPLIED PHYSICS,
1988, 63 (04)
:1158-1162

BOHANDY, J
论文数: 0 引用数: 0
h-index: 0

KIM, BF
论文数: 0 引用数: 0
h-index: 0

ADRIAN, FJ
论文数: 0 引用数: 0
h-index: 0

JETTE, AN
论文数: 0 引用数: 0
h-index: 0
[2]
Femtosecond pulsed laser micromachining of single crystalline 3C-SiC structures based on a laser-induced defect-activation process
[J].
Dong, YY
;
Zorman, C
;
Molian, P
.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING,
2003, 13 (05)
:680-685

Dong, YY
论文数: 0 引用数: 0
h-index: 0
机构:
Iowa State Univ Sci & Technol, Dept Mech Engn, Ames, IA 50011 USA Iowa State Univ Sci & Technol, Dept Mech Engn, Ames, IA 50011 USA

Zorman, C
论文数: 0 引用数: 0
h-index: 0
机构: Iowa State Univ Sci & Technol, Dept Mech Engn, Ames, IA 50011 USA

Molian, P
论文数: 0 引用数: 0
h-index: 0
机构: Iowa State Univ Sci & Technol, Dept Mech Engn, Ames, IA 50011 USA
[3]
LARGE-SCALE 2-STEP SELECTIVE ALUMINUM CVD ON LASER PATTERNED PALLADIUM LINES
[J].
HABA, B
;
SUGAI, K
;
MORISHIGE, Y
;
KISHIDA, S
.
APPLIED SURFACE SCIENCE,
1994, 79-80 (1-4)
:381-384

HABA, B
论文数: 0 引用数: 0
h-index: 0
机构: NEC Corporation, Opto-Electronics Research Laboratories, Miyamae-ku, Kawasaki, Kanagawa, 216

SUGAI, K
论文数: 0 引用数: 0
h-index: 0
机构: NEC Corporation, Opto-Electronics Research Laboratories, Miyamae-ku, Kawasaki, Kanagawa, 216

MORISHIGE, Y
论文数: 0 引用数: 0
h-index: 0
机构: NEC Corporation, Opto-Electronics Research Laboratories, Miyamae-ku, Kawasaki, Kanagawa, 216

KISHIDA, S
论文数: 0 引用数: 0
h-index: 0
机构: NEC Corporation, Opto-Electronics Research Laboratories, Miyamae-ku, Kawasaki, Kanagawa, 216
[4]
VAPOR-DEPOSITION OF PLATINUM USING CW LASER ENERGY
[J].
HESS, MS
;
MILKOSKY, JF
.
JOURNAL OF APPLIED PHYSICS,
1972, 43 (11)
:4680-+

HESS, MS
论文数: 0 引用数: 0
h-index: 0

MILKOSKY, JF
论文数: 0 引用数: 0
h-index: 0
[5]
Ultrafast processes for bulk modification of transparent materials
[J].
Itoh, Kazuyoshi
;
Watanabe, Wataru
;
Nolte, Stefan
;
Schaffer, Chris B.
.
MRS BULLETIN,
2006, 31 (08)
:620-625

Itoh, Kazuyoshi
论文数: 0 引用数: 0
h-index: 0

Watanabe, Wataru
论文数: 0 引用数: 0
h-index: 0

Nolte, Stefan
论文数: 0 引用数: 0
h-index: 0

Schaffer, Chris B.
论文数: 0 引用数: 0
h-index: 0
[6]
Reaction dynamics of CWAr+ laser induced copper direct writing from liquid electrolyte on polyimide substrates
[J].
Kordás, K
;
Nánai, L
;
Galbács, G
;
Uusimäki, A
;
Leppävuori, S
;
Bali, K
.
APPLIED SURFACE SCIENCE,
2000, 158 (1-2)
:127-133

Kordás, K
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Nánai, L
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Galbács, G
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Uusimäki, A
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Leppävuori, S
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Bali, K
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary
[7]
Palladium thin film deposition from liquid precursors on polymers by projected excimer beams
[J].
Kordás, K
;
Nánai, L
;
Bali, K
;
Stépán, K
;
Vajtai, R
;
George, TF
;
Leppävuori, S
.
APPLIED SURFACE SCIENCE,
2000, 168 (1-4)
:66-70

Kordás, K
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary

Nánai, L
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary

Bali, K
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary

Stépán, K
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary

Vajtai, R
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary

George, TF
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary

Leppävuori, S
论文数: 0 引用数: 0
h-index: 0
机构: Univ Szeged, Dept Expt Phys, H-6720 Szeged, Hungary
[8]
Laser-assisted metal deposition from liquid-phase precursors on polymers
[J].
Kordás, K
;
Békési, J
;
Vajtai, R
;
Nánai, L
;
Leppävuori, S
;
Uusimäki, A
;
Bali, K
;
George, TF
;
Galbács, G
;
Ignácz, F
;
Moilanen, P
.
APPLIED SURFACE SCIENCE,
2001, 172 (1-2)
:178-189

Kordás, K
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Békési, J
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Vajtai, R
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Nánai, L
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Leppävuori, S
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Uusimäki, A
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Bali, K
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

George, TF
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Galbács, G
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Ignácz, F
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland

Moilanen, P
论文数: 0 引用数: 0
h-index: 0
机构: Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland
[9]
Laser direct writing of copper on polyimide surfaces from solution
[J].
Kordás, K
;
Bali, K
;
Leppävuori, S
;
Uusimäki, A
;
Nánai, L
.
APPLIED SURFACE SCIENCE,
2000, 154
:399-404

Kordás, K
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Bali, K
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Leppävuori, S
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Uusimäki, A
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary

Nánai, L
论文数: 0 引用数: 0
h-index: 0
机构: Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary
[10]
Atomic-scale visualization of inertial dynamics
[J].
Lindenberg, AM
;
Larsson, J
;
Sokolowski-Tinten, K
;
Gaffney, KJ
;
Blome, C
;
Synnergren, O
;
Sheppard, J
;
Caleman, C
;
MacPhee, AG
;
Weinstein, D
;
Lowney, DP
;
Allison, TK
;
Matthews, T
;
Falcone, RW
;
Cavalieri, AL
;
Fritz, DM
;
Lee, SH
;
Bucksbaum, PH
;
Reis, DA
;
Rudati, J
;
Fuoss, PH
;
Kao, CC
;
Siddons, DP
;
Pahl, R
;
Als-Nielsen, J
;
Duesterer, S
;
Ischebeck, R
;
Schlarb, H
;
Schulte-Schrepping, H
;
Tschentscher, T
;
Schneider, J
;
von der Linde, D
;
Hignette, O
;
Sette, F
;
Chapman, HN
;
Lee, RW
;
Hansen, TN
;
Techert, S
;
Wark, JS
;
Bergh, M
;
Huldt, G
;
van der Spoel, D
;
Timneanu, N
;
Hajdu, J
;
Akre, RA
;
Bong, E
;
Krejcik, P
;
Arthur, J
;
Brennan, S
;
Luening, K
.
SCIENCE,
2005, 308 (5720)
:392-395

Lindenberg, AM
论文数: 0 引用数: 0
h-index: 0
机构:
Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Larsson, J
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Sokolowski-Tinten, K
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Gaffney, KJ
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Blome, C
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Synnergren, O
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Sheppard, J
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Caleman, C
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

MacPhee, AG
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Weinstein, D
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Lowney, DP
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Allison, TK
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Matthews, T
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Falcone, RW
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Cavalieri, AL
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Fritz, DM
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Lee, SH
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Bucksbaum, PH
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Reis, DA
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Rudati, J
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Fuoss, PH
论文数: 0 引用数: 0
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Kao, CC
论文数: 0 引用数: 0
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Siddons, DP
论文数: 0 引用数: 0
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Pahl, R
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Als-Nielsen, J
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Duesterer, S
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Ischebeck, R
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Schlarb, H
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Schulte-Schrepping, H
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h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Tschentscher, T
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Schneider, J
论文数: 0 引用数: 0
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

von der Linde, D
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h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Hignette, O
论文数: 0 引用数: 0
h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Sette, F
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Chapman, HN
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Lee, RW
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Hansen, TN
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Techert, S
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Wark, JS
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h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Bergh, M
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Huldt, G
论文数: 0 引用数: 0
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

van der Spoel, D
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Timneanu, N
论文数: 0 引用数: 0
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Hajdu, J
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Akre, RA
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h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Bong, E
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h-index: 0
机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Krejcik, P
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Arthur, J
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Brennan, S
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA

Luening, K
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机构: Stanford Linear Accelerator Ctr, Stanford Synchrotron Radiat Lab, Menlo Pk, CA 94025 USA