Structure and morphology of aluminium-oxide films formed by thermal oxidation of aluminium

被引:245
作者
Jeurgens, LPH
Sloof, WG
Tichelaar, FD
Mittemeijer, EJ
机构
[1] Delft Univ Technol, Mat Sci Lab, NL-2628 AL Delft, Netherlands
[2] Max Planck Inst Met Res, D-70174 Stuttgart, Germany
关键词
aluminium oxide; oxidation; transmission electron microscopy; surface structure;
D O I
10.1016/S0040-6090(02)00787-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The structure and morphology of thin aluminium-oxide films grown by the dry, thermal oxidation of a bare Al(4 3 1) substrate at a partial oxygen pressure of 1.33 X 10(-4) Pa in the temperature range of 373-773 K were studied using X-ray photoelectron spectroscopy and high resolution electron microscopy. The initial oxidation of the bare Al substrate proceeds by an island-by-layer growth mechanism, involving the lateral diffusion over the bare Al substrate surface of mobile oxygen species. At low temperatures (Tless than or equal to573 K), the mobility of the oxygen species is very low, and an amorphous oxide film of relatively uniform, limiting thickness develops. X-ray photoelectron spectroscopic analysis established the occurrence of a surface-oxide species at the very surface of these films. At higher temperatures (T>573 K) an initially amorphous oxide film of less uniform thickness develops that gradually transforms into crystalline gamma-Al2O3. At these temperatures an amorphous-to-gamma-Al2O3 transition oxide phase occurs. (C) 2002 Elsevier Science B.V, All rights reserved.
引用
收藏
页码:89 / 101
页数:13
相关论文
共 46 条
[1]  
*ASTM, 1991, SURF INTERFACE ANAL, V17, P889, DOI DOI 10.1002/SIA.740171208
[2]   KINETICS OF OXIDATION OF AL IN OXYGEN AT HIGH TEMPERATURE [J].
BECK, AF ;
HEINE, MA ;
CAULE, EJ ;
PRYOR, MJ .
CORROSION SCIENCE, 1967, 7 (01) :1-&
[3]   Variations in the nature of metal adsorption on ultrathin Al2O3 films [J].
Bogicevic, A ;
Jennison, DR .
PHYSICAL REVIEW LETTERS, 1999, 82 (20) :4050-4053
[4]   INTERACTION OF OXYGEN WITH AL(111) STUDIED BY SCANNING-TUNNELING-MICROSCOPY [J].
BRUNE, H ;
WINTTERLIN, J ;
TROST, J ;
ERTL, G ;
WIECHERS, J ;
BEHM, RJ .
JOURNAL OF CHEMICAL PHYSICS, 1993, 99 (03) :2128-2148
[5]   THEORY OF THE OXIDATION OF METALS [J].
CABRERA, N ;
MOTT, NF .
REPORTS ON PROGRESS IN PHYSICS, 1948, 12 :163-184
[6]  
CULLITY BD, 1978, ELEMENTS XRAY DIFFRA, P492
[7]   Role of metal-oxide interface in determining the spin polarization of magnetic tunnel junctions [J].
De Teresa, JM ;
Barthélémy, A ;
Fert, A ;
Contour, JP ;
Montaigne, F ;
Seneor, P .
SCIENCE, 1999, 286 (5439) :507-509
[8]   DIRECT OBSERVATION OF OXIDATION OF ALUMINUM SINGLE-CRYSTAL SURFACES [J].
DOHERTY, PE ;
DAVIS, RS .
JOURNAL OF APPLIED PHYSICS, 1963, 34 (03) :619-&
[9]   THERMAL-OXIDATION OF SINGLE-CRYSTAL ALUMINUM AT 550-DEGREES-C [J].
ELDRIDGE, JI ;
HUSSEY, RJ ;
MITCHELL, DF ;
GRAHAM, MJ .
OXIDATION OF METALS, 1988, 30 (5-6) :301-328
[10]   ADSORPTION AND OXIDE FORMATION ON ALUMINIUM FILMS [J].
ELEY, DD ;
WILKINSON, PR .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1278) :327-342