Influence of etching slope on two-dimensional photonic crystal slab resonators

被引：0

作者：

Kim, Myung-Ki ^{[1
]}

Hwang, In-Kag ^{[2
]}

Yang, Jin-Kyu ^{[1
]}

Lee, Yong-Hee ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Phys, Daejeon 305701, South Korea

[2] Chonnam Natl Univ, Dept Phys, Kwang Ju 500757, South Korea

来源：

OPTOELETRONIC MATERIALS AND DEVICES, PTS 1 AND 2 | 2006年 / 6352卷

关键词：

etching slope; photonic crystal; nanocavity; Q-factor;

D O I：

10.1117/12.688885

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of etching slope on cavity Q-factors in two-dimensional (2D) photonic crystal (PhC) slab is studied. Through FDTD simulation, it is confirmed that the Q-factor decreases with etching slope. The main loss comes from the horizontal coupling into propagating TM-modes. We designed three-lattice-long modified linear cavities having high Q-factors. However, the measured Q-factor was about 250. This small Q-factor is attributed to the non-vertical (13 degrees) side wall.

引用

页数：9

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