Tunable photonic crystals on a freestanding polymer membrane

被引:4
作者
Wang, Yongjin [1 ]
Moench, Wolfgang [2 ]
Aatz, Bernd [2 ]
Zappe, Hans [2 ]
机构
[1] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 9808579, Japan
[2] Univ Freiburg, Lab Microopt, Dept Microsyst Engn, IMTEK, D-79110 Freiburg, Germany
关键词
FABRICATION;
D O I
10.1088/0960-1317/20/1/015003
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two- and three-dimensional polymer photonic crystal structures are fabricated by multi-beam interference lithography. The cross-linked photonic crystal structures are obtained on a freestanding P(MMA-5% MaBP) membrane by combining with the standard silicon process. The resulting photonic crystal structures swell in response to the sorption of acetone solvent in the surrounding atmosphere. The optical effect of the swelling process is characterized by dynamic diffraction experiments. The results indicate that controlled polymer swelling may be used to tune the period (as well as the thickness, and thus efficiency) of the polymer-based photonic crystal structures on freestanding membranes.
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页数:6
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