All graphene electromechanical switch fabricated by chemical vapor deposition

被引：130

作者：

Milaninia, Kaveh M. ^{[1
]}

Baldo, Marc A. ^{[2
]}

Reina, Alfonso ^{[1
]}

Kong, Jing ^{[2
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 18期

关键词：

chemical vapour deposition; electrical contacts; graphene; nanoelectromechanical devices; nanofabrication; switches; thin films; SUSPENDED GRAPHENE; CARBON NANOTUBES; BEARING; SHEETS;

D O I：

10.1063/1.3259415

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films.

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