Chemical stripping of ceramic films of titanium aluminum nitride from hard metal substrates

被引:35
作者
Bonacchi, D
Rizzi, G
Bardi, U
Scrivani, A
机构
[1] Consorzio Interuniv Sci & Tecnol Mat, INSTM, Unita Ric Firenze, I-50019 Sesto Fiorentino, FI, Italy
[2] Univ Parma, Dipartimento Ingn, I-43100 Parma, Italy
关键词
photoelectron spectroscopy; X stripping; magnetron; titanium; nitride;
D O I
10.1016/S0257-8972(02)00720-X
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report here the result of a study of different chemical stripping methodologies for ceramic coatings deposited by PVD on hard metal substrates. We show that an approach based on the study of the system by surface science techniques leads to the possibility of developing effective stripping methods as well as guidelines for improving the process. We will report about two methods tested for the stripping of layers of titanium aluminum nitride (TINALOX) deposited by Physical Vapor Deposition (PVD) on hard metal substrates. The methods were based on (i) the combination of hydrogen peroxide and potassium oxalate in alkaline conditions, and (ii) potassium permanganate in a concentrated sulfuric acid solution. Of the two methods, the second (permanganate and sulfuric acid) appears to be the most promising, although further studies will be needed to optimize the process. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:35 / 39
页数:5
相关论文
共 10 条
  • [1] [Anonymous], 1992, HDB XRAY PHOT SPECTR
  • [2] ON THE COMPOSITION AND STRUCTURE OF THIN-LAYERS OF TITANIUM-OXIDE ON PLATINUM SURFACES
    BARDI, U
    [J]. CATALYSIS LETTERS, 1990, 5 (01) : 81 - 88
  • [3] Corrosion of CrN and TiAlN coatings in chloride-containing atmospheres
    Cunha, L
    Andritschky, M
    Rebouta, L
    Pischow, K
    [J]. SURFACE & COATINGS TECHNOLOGY, 1999, 116 : 1152 - 1160
  • [4] Depth profiling of surface oxidized TiAlN film by synchrotron radiation excited X-ray photoelectron spectroscopy
    Esaka, F
    Furuya, K
    Shimada, H
    Imamura, M
    Matsubayashi, N
    Sato, T
    Nishijima, A
    Kikuchi, T
    Kawana, A
    Ichimura, H
    [J]. SURFACE SCIENCE, 1997, 377 (1-3) : 197 - 200
  • [5] High-resolution XAS spectrum of interstitial nitrogen molecules in the surface oxide matrix of TiAlN film
    Esaka, F
    Shimada, H
    Imamura, M
    Matsubayashi, N
    Kikuchi, T
    Furuya, K
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1998, 88 : 817 - 820
  • [6] CORROSION RESISTANCE OF TITANIUM, ZIRCONIUM, AND STAINLESS STEEL - MINERAL ACIDS
    GOLDEN, LB
    LANE, IR
    ACHERMAN, WL
    [J]. INDUSTRIAL AND ENGINEERING CHEMISTRY, 1952, 44 (08): : 1930 - 1939
  • [7] PANJAN P, 1999, VACUUM, P53
  • [8] SCRIVANI A, 2000, PROC ENV TECHN C HUN, P18
  • [9] *TIMET, 1999, TIT MET CORP CORR RE
  • [10] VILLA R, 2000, LAFER SPA BROCHURE