Self-assembled monolayers (SAMs) of octadecanethiol (ODT) on InAs(100) were prepared and characterized in detail. The native oxide of InAs was removed by a wet chemical etching method which allows formation of ODT SAMs on bare InAs(100) without any exposure to the ambient atmosphere. Contact angle measurement, ellipsometry, Fourier transform infrared spectroscopy, and atomic force microscopy show that the resulting SAMs are smooth, continuous, and, well ordered. X-ray photoelectron spectroscopy confirm bonding, of ODT to the substrate as thlolate. When InAs-ODT is exposed to the ambient atmosphere, some reoxidation of the substrate. takes place Thermal stability studies demonstrate that ODT SAMs ire completely stable up to 140 degrees C, Decomposition of ODT occurs above 250 degrees C.