Characterization of PLD grown WO3 thin films for gas sensing

被引：56

作者：

Boyadjiev, Stefan I. ^{[1
,2
]}

Georgieva, Velichka ^{[1
]}

Stefan, Nicolaie ^{[3
]}

Stan, George E. ^{[4
]}

Mihailescu, Natalia ^{[3
]}

Visan, Anita ^{[3
]}

Mihailescu, Ion N. ^{[3
]}

Besleaga, Cristina ^{[4
]}

Szilagyi, Imre M. ^{[2
,5
]}

机构：

[1] Bulgarian Acad Sci, Inst Solid State Phys, 72 Tzarigradsko Chaussee Blvd, BG-1784 Sofia, Bulgaria

[2] MTA BME Tech Analyt Chem Res Grp, Szent Gellert Ter 4, H-1111 Budapest, Hungary

[3] Natl Inst Lasers Plasma & Radiat Phys, 409 Atomistilor St, RO-077125 Magurele, Ilfov, Romania

[4] Natl Inst Mat Phys, 405A Atomistilor St, RO-077125 Magurele, Ilfov, Romania

[5] Budapest Univ Technol & Econ, Dept Inorgan & Analyt Chem, Szent Gellert Ter 4, H-1111 Budapest, Hungary

来源：

APPLIED SURFACE SCIENCE | 2017年 / 417卷

关键词：

Gas sensor; Quartz crystal microbalance; Pulsed laser deposition; Thin film; WO3; TUNGSTEN TRIOXIDE; MONOCLINIC WO3; POWDERS; IDENTIFICATION; OXIDE;

D O I：

10.1016/j.apsusc.2017.03.212

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Tungsten trioxide (WO3) thin films were grown by pulsed laser deposition (PLD) with the aim to be applied in gas sensors. The films were studied by atomic force microscopy (AFM), X-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy and profilometry. To study the gas sensing behavior of these WO3 films, they were deposited on quartz resonators and the quartz crystal microbalance (QCM) method was applied to analyze their gas sensitivity. Synthesis of tetragonal-WO3 films starting from a target with predominantly monoclinic WO3 phase was observed. The films deposited at 300 degrees C presented a surface topology favorable for the sorption properties, consisting of a film matrix with protruding craters/cavities. QCM prototype sensors with such films were tested for NO2 sensing. The PLD grown WO3 thin films show good sensitivity and fast reaction at room temperature, even in as-deposited state. With the presented technology, the manufacturing of QCM gas sensors is simple, fast and cost-effective, and it is also suitable for energy-effective portable equipment for on-line monitoring of environmental changes. (C) 2017 Elsevier B.V. All rights reserved.

引用

页码：218 / 223

页数：6

共 38 条

[1] Nanosize hexagonal tungsten oxide for gas sensing applications [J].

Balazsi, Csaba ;

Wang, Lisheng ;

Zayim, Esra Ozkan ;

Szilagyi, Imre Miklos ;

Sedlackova, Katarina ;

Pfeifer, Judit ;

Toth, Attila L. ;

Gouma, Pelagia-Irene .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2008, 28 (05) :913-917

[2] Synthesis and characterization of WO3 thin films by surfactant assisted spray pyrolysis for electrochromic applications [J].

Bertus, L. M. ;

Faure, C. ;

Danine, A. ;

Labrugere, C. ;

Campet, G. ;

Rougier, A. ;

Duta, A. .

MATERIALS CHEMISTRY AND PHYSICS, 2013, 140 (01) :49-59

[3] Synthesis of pure and loaded powders of WO3 for NO2 detection through thick film technology [J].

Blo, M ;

Carotta, MC ;

Galliera, S ;

Gherardi, S ;

Giberti, A ;

Guidi, V ;

Malagù, C ;

Martinelli, G ;

Sacerdoti, M ;

Vendemiati, B ;

Zanni, A .

SENSORS AND ACTUATORS B-CHEMICAL, 2004, 103 (1-2) :213-218

[4] Gas sensing properties of very thin TiO2 films prepared by atomic layer deposition (ALD) [J].

Boyadjiev, S. ;

Georgieva, V. ;

Vergov, L. ;

Baji, Zs ;

Gaber, F. ;

Szilagyi, I. M. .

INERA WORKSHOP: TRANSITION METAL OXIDE THIN FILMS-FUNCTIONAL LAYERS IN SMART WINDOWS AND WATER SPLITTING DEVICES. PARALLEL SESSION OF THE 18TH INTERNATIONAL SCHOOL ON CONDENSED MATTER PHYSICS, 2014, 559

[5] Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors [J].

Boyadjiev, S. I. ;

Georgieva, V. ;

Yordanov, R. ;

Raicheva, Z. ;

Szilagyi, I. M. .

APPLIED SURFACE SCIENCE, 2016, 387 :1230-1235

[6]

Cunningham A.J., 1998, INTRO BIOANALYTICAL

[7]

Díaz-Reyes J., 2008, Superf. vacío, V21, P12

[8]

Eason R., 2007, PULSED LASER DEPOSIT, DOI DOI 10.1002/0470052120

[9] Quartz roughness affect on WO3 coated QCM [J].

Georgieva, V. ;

Raicheva, Z. ;

Grechnikov, A. ;

Gadjanova, V. ;

Atanassov, M. ;

Lazarov, J. ;

Manolov, E. .

16 ISCMP: PROGRESS IN SOLID STATE AND MOLECULAR ELECTRONICS, IONICS AND PHOTONICS, 2010, 253

[10]

Georgieva V, 2009, J OPTOELECTRON ADV M, V11, P1363

← 1 2 3 4 →