Reverse-Bias Stress-Induced Electrical Parameters Instability in 4H-SiC JBS Diodes Terminated Nonequidistance FLRs

被引:12
|
作者
Song, Qingwen [1 ]
Yuan, Hao [1 ]
Sun, Qiujie [1 ]
Han, Chao [1 ]
Tang, Xiaoyan [1 ]
Zhang, Yimeng [1 ]
Yuan, Lei [1 ]
Yang, Shuai [1 ]
Zhang, Yuming [1 ]
机构
[1] Xidian Univ, Sch Microelect, Xian 710071, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
4H-SiC; field limiting rings (FLRs); junction barrier Schottky (JBS) diode; reverse-bias stress (RBS); AVALANCHE-BREAKDOWN; VOLTAGE; DEGRADATION; RELIABILITY; RUGGEDNESS;
D O I
10.1109/TED.2019.2931737
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article, the breakdown voltage (V-BR) shift of 4H-SiC JunctionBarrier Schottky (JBS) diodes terminated by optimum nonequidistant field limiting rings (FLRs) subject to reverse-bias stress (RBS) has been investigated, and the corresponding mechanisms are studied in-depth. It can be observed that VBR gradually increases with increasing stress time, but there is no obvious shift of the forward voltage (V-F). The increment in the magnitude of VBR induced by RBS testing is shown to depend strongly on the degree of applied reverse-bias voltage. The physical mechanism of V-BR shifthas been investigatedand explained by means of numerical technical computer-aided design (T-CAD) simulations. Our analysis shows that the hole injection and trapping into SiO2 at the FLR terminal area are identified to be the main cause, resulting in the increase of VBR. Besides, a simple model is proposed to explain the behavior of VBR instability.
引用
收藏
页码:3935 / 3939
页数:5
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