A Gas-Sensitive SPIM Sensor for Detection of Ethanol Using SnO2 as Sensing Element

被引:1
|
作者
Wang, Mengyun [1 ]
Truong, Hoang A. [2 ]
Werner, Carl F. [1 ]
Miyamoto, Ko-ichiro [1 ]
Yoshinobu, Tatsuo [1 ,2 ]
机构
[1] Tohoku Univ, Dept Elect Engn, Aoba Ku, 6-6-05 Aza Aoba, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, Dept Biomed Engn, Aoba Ku, 6-6-05 Aza Aoba, Sendai, Miyagi 9808579, Japan
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2019年 / 216卷 / 12期
关键词
ethanol; gas sensors; SnO2; scanning photo-induced impedance microscopy; visualization; ADDRESSABLE POTENTIOMETRIC SENSOR; PHOTOINDUCED IMPEDANCE MICROSCOPY; OXIDE; VISUALIZATION; IMAGES;
D O I
10.1002/pssa.201800766
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, a gas-sensitive scanning photo-induced impedance microscopy (SPIM) sensor using tin dioxide (SnO2) as sensing element is proposed, which detects the local impedance change on the sensor surface in response to ethanol vapor. The impedance change of the SnO2 film is detected by monitoring the AC photocurrent signal induced by a laser beam. This measurement can be done in a spatially resolved manner by using a scanning laser beam and two-dimensional maps are obtained thanks to the light-addressability of SPIM. This technique is expected to be applied to the visualization of gas distributions on the sensing surface.
引用
收藏
页数:6
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