Thermal Anemometer Based on Metal Organic Chemical Vapour Deposition p-Type (Bi1-xSbx)2Te3 Thin Films

被引：2
作者：
Mzerd, A. [1 ]
Aboulfarah, A. [1 ]
Arbaoui, A. [1 ]
Hassanain, N. [1 ]
Abd-Lefdil, M. [1 ]
Giani, A. [2 ]
Loghmarti, M. [1 ]
机构：
[1] Univ Med V Agdal, Fac Sci, Dept Phys, Phys Mat Lab, Rabat 10106, Morocco
[2] IES, UMR 5412, F-34095 Montpellier 05, France
来源：
SENSOR LETTERS | 2009年 / 7卷 / 05期
关键词：
OMCVD; Thin Films; Thermoelectric; Anemometer; Response Time; Sensitivity; TEMPERATURE; ELABORATION;
D O I：
10.1166/sl.2009.1175
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
In this work, a typical anemometer based on high-quality of (Bi1-xSbx)(2)Te-3 thin films with x = 0.75 is elaborated by metal organic chemical vapour deposition (MOCVD) in horizontal quartz reactor on Kapton substrate heated by high frequency induction HF. We have performed the measurement of the temperature coefficient and the response time. We have also studied the effect of fluid velocity on the sensor resistance and sensitivity compared with platinum trade at different injected currents. It is observed that the temperature coefficient of resistance and the time response are respectively 7 x 10(-3) degrees C-1 and 250 ms. It is interesting to note that our anemometer sensitivity is twice as large as that of the platinum sensor.
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收藏
页码：929 / 932
页数：4
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