Photopatternable ultrathin gate dielectrics for low-voltage-operating organic circuits

被引：25

作者：

Jang, Jaeyoung ^{[1
]}

Kim, Se Hyun ^{[1
]}

Hwang, Jihun ^{[1
]}

Nam, Sooji ^{[1
]}

Yang, Chanwoo ^{[1
]}

Chung, Dae Sung ^{[1
]}

Park, Chan Eon ^{[1
]}

机构：

[1] Pohang Univ Sci & Technol, Polymer Res Inst, Dept Chem Engn, Pohang 790784, South Korea

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 07期

关键词：

curing; dielectric thin films; invertors; leakage currents; organic field effect transistors; organic semiconductors; photolithography; polymer films; TRANSISTORS; KINETICS; POLYMERS;

D O I：

10.1063/1.3206665

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report here a photopatternable ultrathin gate dielectric for the fabrication of low-voltage-operating organic field-effect transistors (OFETs) and inverters. The gate dielectric material is composed of a photocrosslinkable polymer, poly(vinyl cinnamate), and a thermally crosslinkable silane crosslinking reagent, 1,6-bis(trichlorosilyl)hexane. The spin-coated dielectric is photocured with ultraviolet light, which enables fine film patterning via regular photolithography. After thermal curing (at 110 degrees C), the dielectric showed excellent insulating properties (a leakage current density of approximate to 10(-7) A/cm(2) at 2.0 MV/cm) for an ultrathin film thickness of 70 nm, thus reducing the operating voltage of the OFETs and inverters to -5 V.

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页数：3

相关论文

共 13 条

[1] REACTION-KINETICS AND VOLUME RELAXATION DURING POLYMERIZATIONS OF MULTIETHYLENE GLYCOL DIMETHACRYLATES [J].

ANSETH, KS ;

KLINE, LM ;

WALKER, TA ;

ANDERSON, KJ ;

BOWMAN, CN .

MACROMOLECULES, 1995, 28 (07) :2491-2499

[2]

BRANDRUP J, 1999, POLYM HDB, P688

[3] Structure and mechanical properties of thin films deposited from 1,3,5-trimethyl-1,3,5-trivinylcyclotrisiloxane and water [J].

Burkey, DD ;

Gleason, KK .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) :5143-5150

[4] Transistor operation and circuit performance in organic electronics [J].

Cantatore, E ;

Meijer, EJ .

ESSCIRC 2003: PROCEEDINGS OF THE 29TH EUROPEAN SOLID-STATE CIRCUITS CONFERENCE, 2003, :29-36

[5] The path to ubiquitous and low-cost organic electronic appliances on plastic [J].

Forrest, SR .

NATURE, 2004, 428 (6986) :911-918

[6] Hysteresis-free organic field-effect transistors and inverters using photocrosslinkable poly(vinyl cinnamate) as a gate dielectric [J].

Jang, Jaeyoung ;

Kim, Se Hyun ;

Nam, Sooji ;

Chung, Dae Sung ;

Yang, Chanwoo ;

Yun, Won Min ;

Park, Chan Eon ;

Koo, Jae Bon .

APPLIED PHYSICS LETTERS, 2008, 92 (14)

[7] Effect of photoinitiator on photopolymerization of inorganic-organic hybrid polymers (ORMOCER®) [J].

Kim, WS ;

Houbertz, R ;

Lee, TH ;

Bae, YS .

JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 2004, 42 (10) :1979-1986

[8] All-inkjet-printed flexible electronics fabrication on a polymer substrate by low-temperature high-resolution selective laser sintering of metal nanoparticles [J].

Ko, Seung H. ;

Pan, Heng ;

Grigoropoulos, Costas P. ;

Luscombe, Christine K. ;

Frechet, Jean M. J. ;

Poulikakos, Dimos .

NANOTECHNOLOGY, 2007, 18 (34)

[9] Photocurable organic gate insulator for the fabrication of high-field effect mobility organic transistors by low temperature and solution processing [J].

Lee, Tae-Woo ;

Shin, Jung H. ;

Kang, In-Nam ;

Lee, Sang Y. .

ADVANCED MATERIALS, 2007, 19 (18) :2702-+

[10] Photo-DSC cure kinetics of vinyl ester resins. I. Influence of temperature [J].

Scott, TF ;

Cook, WD ;

Forsythe, JS .

POLYMER, 2002, 43 (22) :5839-5845