Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey

被引:55
作者
Rana, M. S. [1 ]
Pota, H. R. [2 ]
Petersen, I. R. [2 ]
机构
[1] Rajshahi Univ Engn & Technol, Dept Elect & Elect Engn, Rajshahi 6204, Bangladesh
[2] Univ New South Wales, Sch Engn & Informat Technol, Canberra, ACT 2600, Australia
基金
澳大利亚研究理事会;
关键词
Atomic force microscopy; nanotechnology; piezoelectric tube scanner; position sensor; probe; scanning probe microscopy; HIGH-SPEED AFM; PIEZOELECTRIC TUBE ACTUATOR; ACTIVE Q CONTROL; HYSTERESIS COMPENSATION; TRACKING CONTROL; VIBRATION COMPENSATION; MEMS NANOPOSITIONER; POSITIONING CONTROL; REPETITIVE CONTROL; STACK ACTUATORS;
D O I
10.1109/TASE.2016.2538319
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Nanotechnology is the branch of science which deals with the manipulation of matters at an extremely high resolution down to the atomic level. In recent years, atomic force microscopy (AFM) has proven to be extremely versatile as an investigative tool in this field. The imaging performance of AFMs is hindered by: 1) the complex behavior of piezo materials, such as vibrations due to the lightly damped low-frequency resonant modes, inherent hysteresis, and creep nonlinearities; 2) the cross-coupling effect caused by the piezoelectric tube scanner (PTS); 3) the limited bandwidth of the probe; 4) the limitations of the conventional raster scanning method using a triangular reference signal; 5) the limited bandwidth of the proportional-integral controllers used in AFMs; 6) the offset, noise, and limited sensitivity of position sensors and photodetectors; and 7) the limited sampling rate of the AFM's measurement unit. Due to these limitations, an AFM has a high spatial but low temporal resolution, i.e., its imaging is slow, e.g., an image frame of a living cell takes up to 120 s, which means that rapid biological processes that occur in seconds cannot be studied using commercially available AFMs. There is a need to perform fast scans using an AFM with nanoscale accuracy. This paper presents a survey of the literature, presents an overview of a few emerging innovative solutions in AFM imaging, and proposes future research directions. Note to Practitioners-An atomic force microscope (AFM) is a scientific instrument capable of investigating, controlling, and manipulating matter on a nanoscale. It is a fundamental part of research in the field of nanotechnology because of its capability to obtain three-dimensional images of specimens in the areas of life sciences and materials science. However, the imaging performances of currently available AFMs are restricted by limitations which, during the last two decades, several works have attempted to overcome in order to meet present demands. This article presents an overview of developments in AFM imaging, emphasizing the key roles of: the modeling, control techniques, and mechanical structural designs of an AFM's piezoelectric tube scanner and probe; different scanning methods; and sensor noise compensation techniques.
引用
收藏
页码:1265 / 1285
页数:21
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