Improved Adhesion Properties of DLC Film Using Silicon-Carbide Fine Particle Bombardment

被引：3

作者：

Kawazoe, Yusuke ^{[1
]}

Nakamura, Morimasa ^{[2
]}

Hirayama, Tomoko ^{[3
]}

Matsuoka, Takashi ^{[3
]}

Miki, Yasuhiro ^{[4
]}

机构：

[1] Sumitomo 3M Ltd, Shizuoka 4101327, Japan

[2] Kyoto Inst Technol, Dept Mech & Syst Eng, Sakyo Ku, Kyoto 6068585, Japan

[3] Doshisha Univ, Dept Mech Eng, Kyoto 6100394, Japan

[4] Nara Prefectural Inst Ind Technol, Nara 6308031, Japan

来源：

JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING | 2008年 / 2卷 / 06期

关键词：

Diamond-Like Carbon; Fine Particle Bombardment Treatment; Adhesion Properties; Preprocessing Technology;

D O I：

10.1299/jamdsm.2.961

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of silicon-carbide fine particle bombardment (FPB) was examined as an easy way to improve the adhesion of diamond-like carbon (DLC) films to a substrate. DLC films were deposited on FPB-treated substrates by plasma-based ion implantation and deposition (PBIID) using CH4 and C2H2 as reactant gases. The adhesion force between the film and substrate was evaluated using the critical load as determined by scratch testing. The FPB treatment improved the adhesion about five times and clearly reduced the wear area of the films. Investigation of the reasons for its effectiveness showed that increased surface roughness accounted for about 67% of the improvement, that increased residual stress of the substrate accounted for about 23%, and that an increased ratio of embedded silicon accounted for about 10%.

引用

页码：961 / 970

页数：10

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