Thin-film nano- and micro-electromechanical systems - the basis of contemporary and future pressure sensors for rocket and aviation engineering

被引：5

作者：

Belozubov, E. M. ^{[1
]}

Vasil'ev, V. A. ^{[1
]}

Gromkov, N. V. ^{[1
]}

机构：

[1] Penza State Univ, Penza, Russia

来源：

MEASUREMENT TECHNIQUES | 2009年 / 52卷 / 07期

关键词：

nano- and micro-electromechanical systems; thin films; tensoresistor; sensor; pressure;

D O I：

10.1007/s11018-009-9336-x

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ways of improving information converters are considered, in particular, primary information converters (sensors). Problems are described that arise during the use of sensors in space rocket and aviation engineering. Designs are presented for thin-film nano- and micro-electromechanical systems that are the basis of contemporary and future tensoresistive pressure sensors. Areas of research are determined with the aim of minimizing the effect of critical destabilizing factors (temperature, vibration) within these systems and pressure sensors based upon them.

引用

页码：739 / 744

页数：6