Development of A 4x4 Hybrid Optical Switch

In this paper, we present a practical approach to realize a highly accurate but low-cost hybrid optical switch. This hybrid optical switch is composed of a MEMS-based silicon micro-mirror-array structure and a mini-actuator array. The silicon micro-mirror-array structure, which includes vertical mirrors, cantilevers, and trenches for passing light beams, are fabricated by using simple KOH etching process. The wet anisotropic silicon etching technique that is employed in this work greatly reduces the complexity of the fabrication process and thus gives higher fabrication yield. The mini-actuator array consists of commercially-available electromagnetic bi-stable mini-relays and L-shape arms. When the L-shape arm does not contact the cantilever, the mirror that is under zero external force can precisely reflect the light beam. When the L-shape arm pushes up the mirror, the light beam can pass under the mirror. The main advantages of this proposed design include high precision, easy for fiber alignment, high fabrication yield as well as low cost.