Dielectrophoretic Modification of Carbon Nanotube with ZnO Nanoparticles for NO2 Gas Sensing

被引:0
作者
Inoue, Shota [1 ]
Nanba, Yushi [1 ]
Nakano, Michihiko [1 ]
Suehiro, Junya [1 ]
机构
[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Fukuoka, Japan
来源
PROCEEDINGS OF THE 2016 IEEE REGION 10 CONFERENCE (TENCON) | 2016年
关键词
carbon nanotubes; dielectrophoresis; gas sensor; nitrogen dioxide; zinc oxcide; FABRICATION; SENSOR;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We developed dielectrophoresis (DEP) - based fabrication method of a carbon nanotube (CNT) NO2 gas sensor that integrates CNT on a microelectrode. The dielectrophoretic integration method can also be used to deposit nanoparticles on CNT surface. This study demonstrates that the modification of the CNT with zinc oxide nanoparticles (ZnO NPs) by dielectrophoresis This sensor were tested by measuring resistance change of the sensor against 1ppm concentration of NO2 at room temperature. The resistance of 0.025 mg/ml and 1.25 mg/ml ZnO NPs-decorated CNT gas sensor rapidly increased followed by slow decreased. This rapid resistance change was saturated by deposition of 25 mg/ml ZnO NPs, and behaved similar to ZnO NW gas sensor. The resistance decrease can be considered as CNT response. The rapid resistance increase cannot be explained by simply summing the responses of the SWCNT sensor and ZnO sensor. The depletion layer of pn-junction due to connection of the CNT and ZnO can be concerned.
引用
收藏
页码:3054 / 3057
页数:4
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