Latent damage in CMOS devices from single-event latchup

被引:44
作者
Becker, HN [1 ]
Miyahira, TF [1 ]
Johnston, AH [1 ]
机构
[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA
关键词
analog-digital conversion; CMOS integrated circuits; digital signal processors; electromigration; latent damage; oscillators; reliability; single-event latchup;
D O I
10.1109/TNS.2002.805332
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Evaluation of several types of CMOS devices after nondestructive latchup revealed structural changes in interconnects that appears to be due to localized ejection of part of the metallization due to melting. This is a potential reliability hazard for CMOS devices because it creates localized voids within interconnects that reduce the cross section by one to two orders of magnitude in the damaged region. These effects must be considered when testing devices for damage from latchup, as well as in establishing limits for current detection and shutdown as a means of latchup protection.
引用
收藏
页码:3009 / 3015
页数:7
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