Size-effects on the optical properties of zirconium oxide thin films

被引：40

作者：

Ramana, C. V. ^{[1
]}

Vemuri, R. S. ^{[1
]}

Fernandez, I. ^{[1
]}

Campbell, A. L. ^{[2
]}

机构：

[1] Univ Texas El Paso, Dept Mech Engn, El Paso, TX 79968 USA

[2] Mat & Mfg Directorate RX, Wright Patterson AFB, OH 45433 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 23期

关键词：

GATE DIELECTRICS; ZRO2; LAYERS;

D O I：

10.1063/1.3271697

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Zirconium oxide (ZrO2) thin films with an average crystallite-size (L) ranging from 5 to 25 nm were grown by sputter deposition onto optical grade quartz substrates. The optical properties of grown ZrO2 films were evaluated using optical transmission and reflectance spectroscopic measurements. The size-effects were significant on the optical characteristics of ZrO2 films. The bandgap energy (E-g) was found to increase from 5.78 to 6.07 eV with decreasing L values from 20 to 7 nm. A direct, linear inverse L-E-g relationship found for ZrO2 films suggest that tuning optical properties for desired applications can be achieved by controlling the size. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3271697]

引用

页数：3

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