Piezoelectrically transduced Single-Crystal-Silicon Plate Resonators

被引：16

作者：

Jaakkola, Antti ^{[1
]}

Rosenberg, Piia ^{[1
]}

Asmala, Samuli ^{[1
]}

Holmgren, Olli ^{[2
]}

Kokkonen, Kimmo ^{[2
]}

Nurmela, Arto ^{[1
]}

Pensala, Tuomas ^{[1
]}

Riekkinen, Tommi ^{[1
]}

Dekker, James ^{[1
]}

Mattila, Tomi ^{[1
]}

Alastalo, Ari ^{[1
]}

机构：

[1] VTT Tech Res Ctr Finland, POB 1000, FI-02044 Espoo, Finland

[2] Aalto Univ, Dept Appl Phys, Espoo, Finland

来源：

2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年

关键词：

D O I：

10.1109/ULTSYM.2008.0171

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We report on the design, fabrication and characterization of piezoelectrically actuated single-crystal silicon plate resonators vibrating mainly in their bulk acoustic wave modes. Two resonator types are presented: one operates in the square extensional mode at 26 MHz with Q similar to 18000 and motional resistance R-m similar to 0.24 k Omega, while the other resonator features a resonance at 22 MHz with Q similar to 51000 and R-m similar to 1.5 k Omega. The resonators are characterized electrically and by scanning laser interferometry. Measured vibration fields are compared to simulated eigenmodes.

引用

页码：717 / +

页数：2

共 10 条

[1] Abdolvand R, 2007, ULTRASON, P608
[2] Auld BA., 1973, Acoustic Fields and Waves in Solids
[3] Imaging of in- and out-of-plane vibrations in micromechanical resonator
Holmgren, O
Kokkonen, K
Mattila, T
Kaajakari, V
Oja, A
Kiihamäki, J
Knuuttila, JV
Salomaa, MM
[J]. ELECTRONICS LETTERS, 2005, 41 (03) : 121 - 122
[4] HOLMGREN O, 2004, IEEE ULTR S, V2
[5] Piezotransduced single-crystal silicon BAW resonators
Jaakkola, Antti
Rosenberg, Piia
Nurmela, Arto
Pensala, Tuomas
[J]. 2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 1653 - 1656
[6] Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications
Kaajakari, V
Mattila, T
Qja, A
Kiihamäki, J
Seppä, H
[J]. IEEE ELECTRON DEVICE LETTERS, 2004, 25 (04) : 173 - 175
[7] Stability of wafer level vacuum encapsulated single-crystal silicon resonators
Kaajakari, Ville
Kiihamaki, Jyrki
Oja, Aarne
Pietikainen, Sami
Kokkala, Ville
Kuisma, Heikki
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2006, 130 : 42 - 47
[8] Electrostatic transducers for micromechanical resonators: Free space and solid dielectric
Kaajakari, Ville
Alastalo, Ari T.
Mattila, Tomi
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (12) : 2484 - 2489
[9] Scanning Michelson interferometer for imaging surface acoustic wave fields
Knuuttila, JV
Tikka, PT
Salomaa, MM
[J]. OPTICS LETTERS, 2000, 25 (09) : 613 - 615
[10] MEMS on cavity-SOI wafers
Luoto, Hannu
Henttinen, Kimmo
Suni, Tommi
Dekker, James
Makinen, Jan
Torkkeli, Altti
[J]. SOLID-STATE ELECTRONICS, 2007, 51 (02) : 328 - 332

← 1 →