Suppression of Spurious Modes in Lithium Niobate A1 Resonators Using Dispersion Matching

被引：0
作者：
Yang, Yansong [1 ]
Gao, Liuqing [1 ]
Lu, Ruochen [1 ]
Gong, Songbin [1 ]
机构：
[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA
来源：
PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2020年
关键词：
5G front-ends; New radio; MEMS; Acoustic; Resonators; Lithium niobate; piezoelectric thin film; Spurious modes suppression; WAVE RESONATORS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work presents an improved design that exploits dispersion matching to suppress the lateral spurious modes in the thin-film lithium niobate first-order antisymmetric Lamb wave mode (A1) resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loading of electrodes. The fabricated devices based on the proposed method exhibit spurious-free responses with a maximum Q(3dB) of 692 and k(t)(2) of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.
引用
收藏
页数：4
相关论文
共 27 条
  • [21] High Q Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation
    Yang, Yansong
    Lu, Ruochen
    Gong, Songbin
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020, 29 (02) : 135 - 143
  • [22] Yang YS, 2019, PROC IEEE MICR ELECT, P875, DOI [10.1109/MEMSYS.2019.8870796, 10.1109/memsys.2019.8870796]
  • [23] 4.5 GHz Lithium Niobate MEMS Filters With 10% Fractional Bandwidth for 5G Front-Ends
    Yang, Yansong
    Lu, Ruochen
    Gao, Liuqing
    Gong, Songbin
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 28 (04) : 575 - 577
  • [24] Yang YS, 2018, P IEEE INT FREQ CONT, P65
  • [25] Yang YS, 2017, PROC IEEE MICR ELECT, P942, DOI 10.1109/MEMSYS.2017.7863565
  • [26] Zhao L., 2019, IEEE T CYBERNETICS, V2019, P1, DOI DOI 10.1109/TCYB.2018.2875134
  • [27] Zuo CJ, 2019, IEEE INT ULTRA SYM, P269, DOI [10.1109/ultsym.2019.8925918, 10.1109/ULTSYM.2019.8925918]
123