Suppression of Spurious Modes in Lithium Niobate A1 Resonators Using Dispersion Matching

被引：0

作者：

Yang, Yansong ^{[1
]}

Gao, Liuqing ^{[1
]}

Lu, Ruochen ^{[1
]}

Gong, Songbin ^{[1
]}

机构：

[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA

来源：

PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2020年

关键词：

5G front-ends; New radio; MEMS; Acoustic; Resonators; Lithium niobate; piezoelectric thin film; Spurious modes suppression; WAVE RESONATORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents an improved design that exploits dispersion matching to suppress the lateral spurious modes in the thin-film lithium niobate first-order antisymmetric Lamb wave mode (A1) resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loading of electrodes. The fabricated devices based on the proposed method exhibit spurious-free responses with a maximum Q(3dB) of 692 and k(t)(2) of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.

引用

页数：4

共 27 条

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[24]

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[25]

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[27]

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