Suppression of Spurious Modes in Lithium Niobate A1 Resonators Using Dispersion Matching

被引：0

作者：

Yang, Yansong ^{[1
]}

Gao, Liuqing ^{[1
]}

Lu, Ruochen ^{[1
]}

Gong, Songbin ^{[1
]}

机构：

[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA

来源：

PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2020年

关键词：

5G front-ends; New radio; MEMS; Acoustic; Resonators; Lithium niobate; piezoelectric thin film; Spurious modes suppression; WAVE RESONATORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents an improved design that exploits dispersion matching to suppress the lateral spurious modes in the thin-film lithium niobate first-order antisymmetric Lamb wave mode (A1) resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loading of electrodes. The fabricated devices based on the proposed method exhibit spurious-free responses with a maximum Q(3dB) of 692 and k(t)(2) of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.

引用

页数：4

共 27 条

[1]

Aigner R, 2018, INT EL DEVICES MEET

[2]

[Anonymous], 5G New Radio Solutions: Revolutionary Applications Here Sooner Than You Think

[3]

[Anonymous], GTI 5G DEVICE RF COM

[4] High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate [J].

Assila, Najoua ;

Kadota, Michio ;

Tanaka, Shuji .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2019, 66 (09) :1529-1535

[5] Cubic Frequency Temperature Dependence in Periodic Structures of Recessed Electrodes on Quartz [J].

Grigorievskii, V. I. ;

Plessky, V. P. .

2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2012, :803-806

[6]

Hashimoto K, 2009, ARTECH HSE MICROW LI, P1

[7] LiNbO3 thin film for A1 mode of Lamb wave resonators [J].

Kadota, Michio ;

Ogami, Takashi ;

Yamamoto, Kansho ;

Tochishita, Hikari .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (05) :1068-1071

[8]

Kimura T, 2019, IEEE INT ULTRA SYM, P1239, DOI [10.1109/ULTSYM.2019.8926065, 10.1109/ultsym.2019.8926065]

[9] Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3-5-GHz Range [J].

Kimura, Tetsuya ;

Omura, Masashi ;

Kishimoto, Yutaka ;

Hashimoto, Kenya .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2019, 67 (03) :915-921

[10]

Kimura T, 2018, IEEE MTT S INT MICR, P846, DOI 10.1109/MWSYM.2018.8439144

← 1 2 3 →