Tailoring the chemical behavior of aluminum for selective etching by laser interference metallurgy

被引:9
作者
D'Alessandria, M. [1 ]
Muecklich, F. [1 ]
机构
[1] Univ Saarland, Dept Mat Sci & Engn, Chair Funct Mat, D-66123 Saarbrucken, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2010年 / 98卷 / 02期
关键词
INDUCED OXIDATION; GROWTH; METALS; FILMS; LAYER; LEAD;
D O I
10.1007/s00339-009-5398-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The chemical behavior of aluminum modified by laser interference metallurgy (LIMET) is investigated. LIMET allows the single-step creation of periodic patterns with a well defined long-range order on material surfaces. This technique can also induce local and periodical oxidation on aluminum surfaces, which follows the ordered array imprinted by laser interference. The thin oxide layer built up during laser structuring enhances the chemical stability of the irradiated zones. Ordered local oxidation permits the selective etching of an exposed aluminum surface. The etch pits are generated preferentially at the interference minima positions. In comparison to conventional methods, this process significantly improves the homogeneity of the initiation sites of pits. Furthermore, LIMET not only influences the first stages of pits initiation, but also the final etch morphology formed during the total electrochemical etching of the surfaces.
引用
收藏
页码:311 / 320
页数:10
相关论文
共 23 条
[1]  
ARAI K, 1981, LIGHT MATA, V31, P675
[2]   The behavior of copper and lead during heat-treatment and surface treatment of aluminium capacitor [J].
Ashitaka, Z ;
Thompson, GE ;
Skeldon, P ;
Wood, GC ;
Shimizu, K .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (04) :1380-1385
[3]   TRANSPORT PROCESSES DURING THE GROWTH OF OXIDE-FILMS AT ELEVATED-TEMPERATURE [J].
ATKINSON, A .
REVIEWS OF MODERN PHYSICS, 1985, 57 (02) :437-470
[4]  
Bauerle D., 2011, LASER PROCESSING CHE
[5]   OPTICAL SELF-REGULATION DURING LASER-INDUCED OXIDATION OF COPPER [J].
BAUFAY, L ;
HOULE, FA ;
WILSON, RJ .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (09) :4640-4651
[6]   THEORY OF THE OXIDATION OF METALS [J].
CABRERA, N ;
MOTT, NF .
REPORTS ON PROGRESS IN PHYSICS, 1948, 12 :163-184
[7]   Direct micro-patterning of aluminum substrates via laser interference metallurgy [J].
D'Alessandria, M. ;
Lasagni, A. ;
Muecklich, F. .
APPLIED SURFACE SCIENCE, 2008, 255 (05) :3210-3216
[8]   Thermal oxidation induced during laser cleaning of an aluminium-magnesium alloy [J].
Dimogerontakis, T ;
Oltra, R ;
Heintz, O .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (06) :1173-1179
[9]  
Jackson N. F., 1975, Electrocomponent Science and Technology, V2, P33, DOI 10.1155/APEC.2.33
[10]   Structuring of metallic bi- and tri-nano-layer films by laser interference irradiation:: control of the structure depth [J].
Lasagni, A ;
Mücklich, F .
APPLIED SURFACE SCIENCE, 2005, 247 (1-4) :32-37