Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters

被引：34

作者：

Amirifar, Nooshin ^{[1
]}

Larde, Rodrigue ^{[1
]}

Talbot, Etienne ^{[1
]}

Pareige, Philippe ^{[1
]}

Rigutti, Lorenzo ^{[1
]}

Mancini, Lorenzo ^{[1
]}

Houard, Jonathan ^{[1
]}

Castro, Celia ^{[1
]}

Sallet, Vincent ^{[2
]}

Zehani, Emir ^{[2
]}

Hassani, Said ^{[2
]}

Sartel, Corine ^{[2
]}

Ziani, Ahmed ^{[3
]}

Portier, Xavier ^{[3
]}

机构：

[1] Univ & INSA Rouen, UMR CNRS 6634, Grp Phys Mat, Ave Univ,BP 12, F-76801 St Etienne, France

[2] CNRS Univ Versailles St Quentin, GEMAC, F-78035 Versailles, France

[3] Univ Caen, UMR CEA CNRS ENSICAEN 6252, Ctr Rech Ions Mat & Photon CIMAP, F-14050 Caen, France

来源：

JOURNAL OF APPLIED PHYSICS | 2015年 / 118卷 / 21期

关键词：

OPTICAL CHARACTERIZATIONS; FIELD EVAPORATION; NANOWIRES; OXIDE; IONIZATION; DEPOSITION; SUBSTRATE; DEVICES; ENERGY; MOCVD;

D O I：

10.1063/1.4936167

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In the last decade, atom probe tomography has become a powerful tool to investigate semiconductor and insulator nanomaterials in microelectronics, spintronics, and optoelectronics. In this paper, we report an investigation of zinc oxide nanostructures using atom probe tomography. We observed that the chemical composition of zinc oxide is strongly dependent on the analysis parameters used for atom probe experiments. It was observed that at high laser pulse energies, the electric field at the specimen surface is strongly dependent on the crystallographic directions. This dependence leads to an inhomogeneous field evaporation of the surface atoms, resulting in unreliable measurements. We show that the laser pulse energy has to be well tuned to obtain reliable quantitative chemical composition measurements of undoped and doped ZnO nanomaterials. (C) 2015 AIP Publishing LLC.

引用

页数：10

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