Nanotweezers with Proximity Sensing and Gripping Force Control System

被引：3

作者：

Umemoto, Takeshi ^{[1
]}

Ayano, Kenjiro ^{[2
]}

Suzuki, Masato ^{[2
]}

Yasutake, Masatoshi ^{[1
]}

Konno, Takashi ^{[2
]}

Hashiguchi, Gen ^{[3
]}

机构：

[1] SII NanoTechnol Inc, Shizuoka 4101393, Japan

[2] Aoi Elect Co Ltd, Takamatsu, Kagawa 7618014, Japan

[3] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2009年 / 48卷 / 08期

关键词：

D O I：

10.1143/JJAP.48.08JB21

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nanoscale electromechanical systems-nanotweezers with highly intelligent functions-based on an electrostatic comb drive actuator have been developed for the manipulation and interrogation of nanostructures, These nanotweezers can detect contact with the substrate or sample during approaching or gripping operation by monitoring the resonance state change of the comb drive. A contact position reproducibility of 10 nm is obtained, which prevents the crushing of the probe against the substrate and increases the reliability of sample gripping. The manipulation and detection functions of these nanotweezers are evaluated in a focused ion beam/scanning electron microscopy (FIB/SEM) system. (C) 2009 The Japan Society of Applied Physics

引用

页数：4

共 7 条

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