High-resolution pressure sensor for photo acoustic gas detection

被引：16

作者：

Schjolberg-Henriksen, K.

Wang, D. T.

Rogne, H.

Ferber, A.

Vogl, A.

Moe, S.

Bernstein, R.

Lapadatu, D.

Sandven, K.

Brida, S.

机构：

[1] SINTEF ICT, N-0314 Oslo, Norway

[2] SensoNor, N-3192 Horten, Norway

[3] Esterline, F-18941 Bourges 9, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 132卷 / 01期

关键词：

pressure sensor; CO2; photo acoustic gas sensor;

D O I：

10.1016/j.sna.2006.02.019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel micromachined pressure sensor and its use in photo acoustic gas detection. The pressure sensor has a bossed membrane with two areas with different thicknesses, giving a resolution of 9 or mu V/V Pa, depending on the boss radius. At the same time, the burst pressure is above I bar. Device fabrication and characterisation is presented, and the sensor is demonstrated to function in photo acoustic CO2 cells manufactured both by manual mounting and anodic bonding. The sensor is designed for a high volume commercial foundry process, and the bonded photo acoustic cells are suitable for large-scale production. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：207 / 213

页数：7

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