Adsorbate-mediated step transformations and terrace rearrangement of Si(100)-(2x1)

被引：4

作者：

Butera, R. E. ^{[1
]}

Suwa, Yuji ^{[2
]}

Hashizume, Tomihiro ^{[2
]}

Weaver, J. H. ^{[1
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

[2] Hitachi Ltd, Adv Res Lab, Tokyo 1858601, Japan

来源：

PHYSICAL REVIEW B | 2009年 / 80卷 / 19期

关键词：

adsorbed layers; adsorption; chlorine; density functional theory; diffusion; elemental semiconductors; etching; scanning tunnelling microscopy; silicon; surface phase transformations; surface structure; vacancies (crystal); VICINAL SI(001) SURFACES; ATOMIC-HYDROGEN; ADSORPTION; CHLORINE; PSEUDOPOTENTIALS;

D O I：

10.1103/PhysRevB.80.193307

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Scanning tunneling microscopy and density-functional theory have been combined to demonstrate structural transformations of steps of Si(100)-(2x1) induced by nondangling bond-terminated Cl adsorbates. We identify a stable, bridge-bonded step adsorption site and show that supersaturation facilitates the population of those sites, leading to rebonded atom etching, step retreat, and extensive terrace rearrangement from the diffusion of resultant atomic vacancy lines across the supersaturated surface. Similarities to H-Si(100) are briefly discussed.

引用

页数：4

共 50 条

[21] Metallization onset in K/Si(100)-(2x1) [J].

Segovia, P ;

Castro, GR ;

Mascaraque, A ;

Michel, EG .

SURFACE SCIENCE, 1997, 377 (1-3) :220-224

[22] Adsorption of cobalt phthalocyanine on Si(100)2x1 and Si(100)2x1:H surfaces studied by scanning tunneling microscopy and spectroscopy [J].

Liu, LQ ;

Yu, JX ;

Viernes, NOL ;

Moore, JS ;

Lyding, JW .

SURFACE SCIENCE, 2002, 516 (1-2) :118-126

[23] Diffusion of excessively adsorbed hydrogen atoms on hydrogen terminated Si(100)(2x1) surface [J].

Inagaki, Kouji ;

Morikawa, Yoshitada ;

Ohmi, Hiromasa ;

Yasutake, Kiyoshi ;

Kakiuchi, Hiroaki .

AIP ADVANCES, 2021, 11 (08)

[24] Adsorption and decomposition of CICN on Si(100)-(2x1) surface: A density functional theory study [J].

Hu, RM ;

Li, Y ;

Zhang, YF ;

Li, JQ ;

Chen, Y .

JOURNAL OF THEORETICAL & COMPUTATIONAL CHEMISTRY, 2004, 3 (03) :471-479

[25] A Model for Atomic Precision p-Type Doping with Diborane on Si(100)-2x1 [J].

Campbell, Quinn ;

Ivie, Jeffrey A. ;

Bussmann, Ezra ;

Schmucker, Scott W. ;

Baczewski, Andrew D. ;

Misra, Shashank .

JOURNAL OF PHYSICAL CHEMISTRY C, 2021, 125 (01) :481-488

[26] Adsorption and decomposition of FCN on Si(100)-(2x1) surface: A density functional theory study [J].

Hu, JM ;

Li, Y ;

Zhang, YF ;

Li, JQ ;

Chen, Y .

JOURNAL OF MOLECULAR STRUCTURE-THEOCHEM, 2005, 724 (1-3) :25-30

[27] First principles study of Al-Si nanosized clusters on Si(100)-2x1 [J].

Zavodinsky, VG .

SURFACE SCIENCE, 2002, 516 (1-2) :203-206

[28] Monte Carlo simulations of monatomic steps dynamics on Si(100)-(2x1) [J].

Williams, FJ ;

Sanchez, JR ;

Aldao, CM .

SURFACE SCIENCE, 1997, 391 (1-3) :260-266

[29] Bonding geometries of F and Cl on Si(100)-2x1 [J].

Simpson, WC ;

Yarmoff, JA .

SURFACE SCIENCE, 1996, 359 (1-3) :135-146

[30] Adsorption of elemental S on Si(100)-2x1 surfaces [J].

Papageorgopoulos, A ;

Kamaratos, M .

SURFACE SCIENCE, 1996, 352 :364-368

← 1 2 3 4 5 →