Fabrication of ridge waveguides in LiNbO3 thin film crystal by proton-exchange accelerated etching

被引：15
|
作者：
Takaoka, T. [1 ]
Fujimura, M. [1 ]
Suhara, T. [1 ]
机构：
[1] Osaka Univ, Dept Elect Elect & Informat Engn, Grad Sch Engn, Suita, Osaka 5650871, Japan
来源：
ELECTRONICS LETTERS | 2009年 / 45卷 / 18期
关键词：
LITHIUM-NIOBATE; GENERATION;
D O I：
10.1049/el.2009.1693
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A simple fabrication method of adhered LiNbO3 ridge waveguides by accelerated etching of the proton-exchanged region is proposed and demonstrated. The waveguides were fabricated and tested at 1.55 mu m wavelength. Strongly confined guided modes were obtained. The waveguides are suitable for efficient nonlinear-optic wavelength conversion devices.
引用
收藏
页码：940 / 941
页数：2
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