Change of kinetic roughening with surfactant hydrogen in Ge on Si(001) system

被引:0
|
作者
Kahng, SJ
Kuk, Y
机构
关键词
silicon; germanium; surfactant; hydrogen; surface roughening;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The growth mode of Ge on a Si(001) substrate can be modified in the presence of dynamically supplied atomic hydrogen as a surfactant. A transition from the 3D to 2D growth was observed in scanning tunneling microscope images as the hydrogen flux increased to 1ML/sec. A layer-by-layer growth was successfully achieved with the hydrogen surfactant up to 8 monolayers of Ge. This growth behavior can be explained by kinetic roughening theory, showing a scaling behavior. The growth and roughness exponents, alpha and beta, seem to decrease with hydrogen. It is believed that hydrogen saturates the dangling bonds and limits diffusion of the incoming Ge, resulting in a formation of large two dimensional islands.
引用
收藏
页码:59 / 61
页数:3
相关论文
共 50 条
  • [1] KINETIC ROUGHENING OF VICINAL SI(001)
    HEGEMAN, PE
    ZANDVLIET, HJW
    KIP, GAM
    VANSILFHOUT, A
    SURFACE SCIENCE, 1994, 311 (1-2) : L655 - L660
  • [3] Hydrogen-surfactant mediated growth of Ge on Si(001)
    Kahng, SJ
    Ha, YH
    Park, JY
    Kim, S
    Moon, DW
    Kuk, Y
    PHYSICAL REVIEW LETTERS, 1998, 80 (22) : 4931 - 4934
  • [4] Influence of hydrogen-surfactant coverage on Ge/Si(001) heteroepitaxy
    Fujino, T
    Katayama, M
    Yamazaki, Y
    Inoue, S
    Okuno, T
    Oura, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2002, 41 (7A): : L790 - L793
  • [5] KINETIC SURFACE ROUGHENING OF SI(001) DURING SUBLIMATION
    METOIS, JJ
    WOLF, DE
    SURFACE SCIENCE, 1993, 298 (01) : 71 - 78
  • [6] Origin of roughening in epitaxial growth of silicon on Si(001) and Ge(001) surfaces
    Zandvliet, HJW
    Zoethout, E
    Wulfhekel, W
    Poelsema, B
    SURFACE SCIENCE, 2001, 482 : 391 - 395
  • [7] Roughening and islanding of monolayer Ge coverage on vicinal Si(001) surface
    Guo, LW
    Lin, N
    Huang, Q
    Zhou, JM
    Cue, N
    APPLIED SURFACE SCIENCE, 1998, 126 (3-4) : 213 - 218
  • [8] SURFACTANT EFFECT OF BI AND SB ON SI/GE/SI(001) HETEROEPITAXY
    MATSUHATA, H
    SAKAMOTO, K
    KYOYA, K
    MIKI, K
    SAKAMOTO, T
    MICROSCOPY OF SEMICONDUCTING MATERIALS 1993, 1993, (134): : 395 - 398
  • [9] ABRUPT SI/GE/SI(001) INTERFACES FABRICATED WITH BI AS A SURFACTANT
    SAKAMOTO, K
    MATSUHATA, H
    KYOYA, KI
    MIKI, K
    SAKAMOTO, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (4B): : 2307 - 2310
  • [10] Abrupt Si/Ge/Si(001) interfaces fabricated with Bi as a surfactant
    Sakamoto, Kunihiro, 1600, JJAP, Minato-ku, Japan (33):