A Time-Based Electronic Front-End for a Capacitive Particle Matter Detector

被引：10

作者：

Ferlito, Umberto ^{[1
]}

Grasso, Alfio Dario ^{[1
]}

Vaiana, Michele ^{[2
]}

Bruno, Giuseppe ^{[2
]}

机构：

[1] Univ Catania, Dipartimento Ingn Elettr Elettron & Informat, I-95125 Catania, Italy

[2] STMicroelectronics, I-95121 Catania, Italy

来源：

SENSORS | 2021年 / 21卷 / 05期

关键词：

capacitive sensor; particulate matter (PM); ring oscillators; smart sensors; AIRBORNE PARTICULATE MATTER; TO-DIGITAL CONVERTER; CURRENT-MODE; SENSOR; INTERFACE; SENSITIVITY;

D O I：

10.3390/s21051840

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper introduces the electronic interface for a capacitive airborne particle matter detector. The proposed circuit relies on two matched ring oscillators and a mixer to detect the frequency difference induced by the deposition of a particle onto an interdigitated capacitor, which constitutes the load of one of the oscillators. The output of the mixer is digitized through a simple counter. In order to compensate the oscillation frequency offset of the two ring oscillators due to process and mismatch variations, a capacitive trimming circuit has been implemented. The sensor is connected to host through an I2C interface for communication and configuration. The sensor has been implemented using a standard 130-nm CMOS technology by STMicroelectronics and occupies 0.12-mm(2) die area. Experimental measurements using talcum powder show a sensitivity of 60 kHz/fF and a 3 sigma resolution equal to 165 aF.

引用

页码：1 / 16

页数：16

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