SRAM stability design comprehending 14nm FinFET Reliability

被引:0
作者
Bae, Choelhwyi [1 ]
Pae, Sangwoo [1 ]
Yu, Cheong-sik [1 ]
Kim, Kangjung [1 ]
Kim, Yongshik [2 ]
Park, Jongwoo [1 ]
机构
[1] Samsung Elect, Technol Qual & Reliabil, Syst LSI Business, Yongin, Gyeonggi Do, South Korea
[2] Samsung Elect, Technol Dev, Syst LSI Business, Yongin, Gyeonggi Do, South Korea
来源
2015 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS) | 2015年
关键词
SRAM; HTOL; Vmin; Bias-temperature instability;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Importance of low voltage operation of SRAM in mobile application is ever increasing for longer battery life. SRAM occupies a significant portion of the total area and power for the SOC ICs (> 10-30MByte used in AP/CPUs). For the operation of SRAM at low voltage, proper noise margin for read, disturb and write operation is important since noise margin reduces with technology scaling and low voltage operation. Previously, we presented a method on SRAM Vmin design and characterization before and after High Temperature Operating Life (HTOL) stress test [1-3]. In this work, we extend our method to account for end-of-life aging into statistical SRAM cell design with Z-score method on 14nm FinFET technology. Excellent Vmin behavior at both time0 and EOL satisfying 10yrs was demonstrated at the product level.
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页数:5
相关论文
共 9 条
[1]  
[Anonymous], IRPS
[2]   Mechanism of electron trapping and characteristics of traps in HfO2 gate stacks [J].
Bersuker, Gennadi ;
Sim, J. H. ;
Park, Chang Seo ;
Young, Chadwin D. ;
Nadkarni, Suvid V. ;
Choi, Rino ;
Lee, Byoung Hun .
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2007, 7 (01) :138-145
[3]  
Kerber A, 2013, INT RELIAB PHY SYM
[4]  
Kim Y., 2008, IEEE VLSI
[5]  
Krishnan AT, 2006, INT EL DEVICES MEET, P77
[6]  
Lim S.-M., 2011, IEEE IRPS, P105
[7]   BTI reliability of 45 nm high-k plus metal-gate process technology [J].
Pae, S. ;
Agostinelli, M. ;
Brazie, M. ;
Chau, R. ;
Dewey, G. ;
Ghani, T. ;
Hattendorf, M. ;
Hicks, J. ;
Kavalieros, J. ;
Kuhn, K. ;
Kuhn, M. ;
Maiz, J. ;
Metz, M. ;
Mistry, K. ;
Prasad, C. ;
Ramey, S. ;
Roskowski, A. ;
Sandford, J. ;
Thomas, C. ;
Thomas, J. ;
Wiegand, C. ;
Wiedemer, J. .
2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL, 2008, :352-+
[8]   Effect of BTI Degradation on Transistor Variability in Advanced Semiconductor Technologies [J].
Pae, Sangwoo ;
Maiz, Jose ;
Prasad, Chetan ;
Woolery, Bruce .
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2008, 8 (03) :519-525
[9]   Review and reexamination of reliability effects related to NBTI-induced statistical variations [J].
Rauch, Stewart E., III .
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2007, 7 (04) :524-530