Low-loss propagation in photonic crystal waveguides

被引：87
作者：
O'Faolain, L. [1 ]
Yuan, X.
McIntyre, D.
Thoms, S.
Chong, H.
De la Rue, R. M.
Krauss, T. F.
机构：
[1] Univ St Andrews, Sch Phys & Astron, St Andrews, Fife, Scotland
[2] Natl Univ Def Technol, Sch Opt Engn, Changsha, Hunan, Peoples R China
[3] Univ Glasgow, Dept Elect & Elect Engn, Glasgow G12 8LT, Lanark, Scotland
来源：
ELECTRONICS LETTERS | 2006年 / 42卷 / 25期
关键词：
Crystal defects - Crystalline materials - Etching - Optimization;
D O I：
10.1049/el:20063077
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The fabrication and characterisation of high-quality silicon membrane photonic crystals are reported. The etching process was carefully optimised to give holes with very smooth and vertical sidewalls, resulting in propagation, with a minimum loss of 4.1 +/- 0.9 dB/cm in a single line defect (W1) waveguide.
引用
收藏
页码：1454 / 1455
页数：2
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