Coherent extreme-ultraviolet generation at 64 nm by efficient frequency tripling of an ArF laser

被引：2
作者：
Hirakawa, Y
Okada, T
Maeda, M
Muraoka, K
机构：
[1] KYUSHU UNIV, GRAD SCH INFORMAT SCI & ELECT ENGN, FUKUOKA 81281, JAPAN
[2] KYUSHU UNIV, GRAD SCH ENGN SCI, KASUGA, FUKUOKA 816, JAPAN
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 1997年 / 14卷 / 05期
关键词：
D O I：
10.1364/JOSAB.14.001029
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Third-harmonic (TH) generation for an ArF excimer laser in a hydrogen (H-2) gas jet was investigated. When the ArF laser radiation was tuned into a two-photon resonance in H-2, enhanced efficiency for TH was observed. Optimum experimental conditions of efficient TH generation for our apparatus such as gas-jet density and energy fluence of the laser were obtained. Calculation of the phase-matching condition including absorption led to an optimum gas-jet profile for TH generation. Absolute TH energy of similar to 1-mu J pulse was measured by two different methods. The proposed narrow-band extreme-ultraviolet source with a commercial excimer laser with a high repetition rate should be useful not only for scientific applications but also for industrial applications such as laser processing. (C) 1997 Optical Society of America.
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收藏
页码：1029 / 1034
页数：6
相关论文
共 13 条
[1]   OPTICAL HARMONIC-GENERATION IN NONUNIFORM GASEOUS MEDIA WITH APPLICATION TO FREQUENCY TRIPLING IN FREE-JET EXPANSIONS [J].
BETHUNE, DS ;
RETTNER, CT .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (08) :1348-1360
[2]   BROADLY TUNABLE VACUUM ULTRAVIOLET EXTREME-ULTRAVIOLET RADIATION GENERATED BY RESONANT 3RD-ORDER FREQUENCY-CONVERSION IN KRYPTON [J].
HILBER, G ;
LAGO, A ;
WALLENSTEIN, R .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1987, 4 (11) :1753-1764
[3]   RESONANT 3RD-HARMONIC GENERATION OF ARF LASER IN H-2-GAS AND KR-GAS JETS AT 64 NM [J].
HIRAKAWA, Y ;
OKADA, T ;
MAEDA, M ;
MURAOKA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (06) :L958-L960
[4]   GENERATION OF TUNABLE COHERENT EXTREME-ULTRAVIOLET RADIATION AT WAVELENGTHS AS LOW AS 66 NM BY RESONANT 4-WAVE-MIXING [J].
HIRAKAWA, Y ;
NAGAI, A ;
MURAOKA, K ;
OKADA, T ;
MAEDA, M .
OPTICS LETTERS, 1993, 18 (09) :735-737
[5]   ABSOLUTE DENSITY-MEASUREMENT OF A PULSED H-2 GAS-JET USED FOR EXTREME-ULTRAVIOLET GENERATION BY NONLINEAR FREQUENCY-CONVERSION [J].
HIRAKAWA, Y ;
NAGAI, A ;
OKADA, T ;
MAEDA, M ;
MURAOKA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1994, 33 (2A) :L183-L185
[6]   GENERATION OF TUNABLE COHERENT XUV RADIATION IN A HYDROGEN GAS-JET BY 2-PHOTON RESONANT 4-WAVE-MIXING [J].
HIRAKAWA, Y ;
OKADA, T ;
MAEDA, M ;
MURAOKA, K .
OPTICS COMMUNICATIONS, 1991, 84 (5-6) :365-368
[7]  
KLINGER DJ, 1980, PHYS REV A, V21, P607
[8]   Resonant multiphoton ionization of H-2 by an ArF laser and application to atmospheric molecules [J].
Maeda, M ;
Okada, T ;
Hirakawa, Y ;
Uchiumi, M ;
Muraoka, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (5A) :2672-2676
[9]   STUDIES OF MULTIPHOTON PRODUCTION OF VACUUM ULTRAVIOLET-RADIATION IN THE RARE-GASES [J].
MCPHERSON, A ;
GIBSON, G ;
JARA, H ;
JOHANN, U ;
LUK, TS ;
MCINTYRE, IA ;
BOYER, K ;
RHODES, CK .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1987, 4 (04) :595-601
[10]   HIGH-ORDER HARMONIC-GENERATION IN THE TUNNELING REGIME [J].
MIYAZAKI, K ;
TAKADA, H .
PHYSICAL REVIEW A, 1995, 52 (04) :3007-3021
12