A novel method to determine electron density by optical emission spectroscopy in low-pressure nitrogen plasmas

被引：20

作者：

Zhu, Xi-Ming ^{[1
]}

Pu, Yu-Dong ^{[1
]}

Guo, Zhi-Gang ^{[1
]}

Pu, Yi-Kang ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Engn Phys, Beijing 100084, Peoples R China

来源：

PHYSICS OF PLASMAS | 2006年 / 13卷 / 12期

基金：

中国国家自然科学基金;

关键词：

MOLECULAR NITROGEN; TEMPERATURE; DISCHARGES;

D O I：

10.1063/1.2397583

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A novel method to determine volume averaged electron density by optical emission spectroscopy is investigated in inductively coupled nitrogen plasma. Using a kinetic model of low-pressure nitrogen discharge, volume averaged electron density can be obtained from experimentally measured vibrational distribution of the excited state C-3 Pi(u) of the nitrogen molecule. Electron density versus rf power determined by this method and Langmuir probe measurement is compared and found to be in good agreement. (c) 2006 American Institute of Physics.

引用

页数：4

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