Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

被引：26
作者：
Balderas-Valadez, R. F. [1 ]
Agarwal, V. [1 ]
Pacholski, C. [2 ,3 ]
机构：
[1] UAEM, CIICAp, Av Univ 1001 Col Chamilpa, Cuernavaca 62210, Morelos, Mexico
[2] Max Planck Inst Intelligent Syst, Dept New Mat & Biosyst, Heisenbergstr 3, D-70569 Stuttgart, Germany
[3] Univ Potsdam, Inst Chem, Muhlenberg 3, D-14476 Potsdam, Germany
来源：
RSC ADVANCES | 2016年 / 6卷 / 26期
关键词：
FOURIER-TRANSFORM SPECTROSCOPY; NANOSTRUCTURES; NANOWIRES;
D O I：
10.1039/c5ra26816h
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.
引用
收藏
页码：21430 / 21434
页数：5
相关论文
共 25 条
[1]   Galvanic porous silicon formation without external contacts [J].
Ashruf, CMA ;
French, PJ ;
Bressers, PMMC ;
Kelly, JJ .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) :118-122
[2]   Effect of noble metal catalyst species on the morphology of macroporous silicon formed by metal-assisted chemical etching [J].
Asoh, Hidetaka ;
Arai, Fusao ;
Ono, Sachiko .
ELECTROCHIMICA ACTA, 2009, 54 (22) :5142-5148
[3]   Porous silicon: a quantum sponge structure for silicon based optoelectronics [J].
Bisi, O ;
Ossicini, S ;
Pavesi, L .
SURFACE SCIENCE REPORTS, 2000, 38 (1-3) :1-126
[4]   Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching [J].
Boarino, Luca ;
Imbraguglio, Dario ;
Enrico, Emanuele ;
De Leo, Natascia ;
Celegato, Federica ;
Tiberto, Paola ;
Pugno, Nicola ;
Amato, Giampiero .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (06) :1412-1416
[5]  
Canham L., 2014, HDB POROUS SILICON
[6]   Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching [J].
Chang, Shih-Wei ;
Chuang, Vivian P. ;
Boles, Steven T. ;
Ross, Caroline A. ;
Thompson, Carl V. .
ADVANCED FUNCTIONAL MATERIALS, 2009, 19 (15) :2495-2500
[7]   Biodegradable Porous Silicon Barcode Nanowires with Defined Geometry [J].
Chiappini, Ciro ;
Liu, Xuewu ;
Fakhoury, Jean Raymond ;
Ferrari, Mauro .
ADVANCED FUNCTIONAL MATERIALS, 2010, 20 (14) :2231-2239
[8]   Temperature-dependent thermal conductivity of porous silicon [J].
Gesele, G ;
Linsmeier, J ;
Drach, V ;
Fricke, J ;
ArensFischer, R .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (21) :2911-2916
[9]   Metal-Assisted Chemical Etching of Silicon: A Review [J].
Huang, Zhipeng ;
Geyer, Nadine ;
Werner, Peter ;
de Boor, Johannes ;
Goesele, Ulrich .
ADVANCED MATERIALS, 2011, 23 (02) :285-308
[10]   Silicon nanostructures from electroless electrochemical etching [J].
Kolasinski, Kurt W. .
CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 2005, 9 (1-2) :73-83
123