Rate dependence of short-pulse laser ablation of metals in air and vacuum

被引：100

作者：

Wynne, AE ^{[1
]}

Stuart, BC ^{[1
]}

机构：

[1] Lawrence Livermore Natl Lab, Livermore, CA 94550 USA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 76卷 / 03期

关键词：

D O I：

10.1007/s00339-002-1823-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ablation rates of aluminum and stainless steel are studied as a function of fluence, hole depth, pulse duration and ambient pressure (air vs vacuum). We find a weak rate dependence on pulse duration from 150 fs to 500 ps, and a strong rate dependence on hole depth due to surface roughness. Machining in air plays an important role in deep holes, but has a weaker influence on initial surface ablation rates. Oxidation greatly reduces drilling rates for deep holes in aluminum.

引用

页码：373 / 378

页数：6

共 19 条

[1] Laser processing of sapphire with picosecond and sub-picosecond pulses [J].

Ashkenasi, D ;

Rosenfeld, A ;

Varel, H ;

Wahmer, M ;

Campbell, EEB .

APPLIED SURFACE SCIENCE, 1997, 120 (1-2) :65-80

[2] Material effects in ultra-short pulse laser drilling of metals [J].

Banks, PS ;

Feit, MD ;

Rubenchik, AM ;

Stuart, BC ;

Perry, MD .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1) :S377-S380

[3]

Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637

[4] THERMAL RESPONSE OF METALS TO ULTRASHORT-PULSE LASER EXCITATION [J].

CORKUM, PB ;

BRUNEL, F ;

SHERMAN, NK ;

SRINIVASANRAO, T .

PHYSICAL REVIEW LETTERS, 1988, 61 (25) :2886-2889

[5] NANOSECOND AND FEMTOSECOND EXCIMER-LASER ABLATION OF OXIDE CERAMICS [J].

IHLEMANN, J ;

SCHOLL, A ;

SCHMIDT, H ;

WOLFFROTTKE, B .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (04) :411-417

[6]

Juhasz T, 2000, LASER PHYS, V10, P495

[7]

KAUTEK W, 1994, PROC SPIE, V2207, P600, DOI 10.1117/12.184768

[8] Precision laser ablation of dielectrics in the 10-fs regime [J].

Lenzner, M ;

Krüger, J ;

Kautek, W ;

Krausz, F .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (03) :369-371

[9] Polarization effects in ultrashort-pulse laser drilling [J].

Nolte, S ;

Momma, C ;

Kamlage, G ;

Ostendorf, A ;

Fallnich, C ;

von Alvensleben, F ;

Welling, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (05) :563-567

[10]

Nolte S, 2000, ADV ENG MATER, V2, P23, DOI 10.1002/(SICI)1527-2648(200002)2:1/2<23::AID-ADEM23>3.0.CO

← 1 2 →