Obtaining the dielectric constant of solids from capacitance measurements with a pointer electrode

被引:6
作者
Guadarrama-Santana, A. [1 ]
Garcia-Valenzuela, A. [1 ]
机构
[1] Univ Nacl Autonoma Mexico, Ctr Ciencias Aplicadas & Desarrollo Tecnol, Mexico City 04510, DF, Mexico
关键词
SCANNING CAPACITANCE; MICROSCOPY; SAMPLE; PROBE;
D O I
10.1063/1.3239406
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We analyze the determination of the dielectric constant of macroscopic solid samples in a nondestructive way from measurements of the capacitance between a pointer electrode and the sample's surface. We assembled an experimental device and found that an accuracy of 1% or better can be attained with common laboratory instrumentation. (C) 2009 American Institute of Physics. [doi:10.1063/1.3239406]
引用
收藏
页数:3
相关论文
共 13 条
[1]   Nondestructive thickness measurement of biological layers at the nanoscale by simultaneous topography and capacitance imaging [J].
Casuso, Ignacio ;
Fumagalli, Laura ;
Gomila, Gabriel ;
Padros, Esteve .
APPLIED PHYSICS LETTERS, 2007, 91 (06)
[2]   ACCURATE MEASUREMENT OF THE DIELECTRIC-CONSTANT OF SOLIDS [J].
COOKE, C ;
FORD, JE .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1981, 14 (11) :1285-1287
[3]   Dielectric-constant measurement of thin insulating films at low frequency by nanoscale capacitance microscopy [J].
Fumagalli, Laura ;
Ferrari, Giorgio ;
Sampietro, Marco ;
Gomila, Gabriel .
APPLIED PHYSICS LETTERS, 2007, 91 (24)
[4]   Theory of electrostatic probe microscopy:: A simple perturbative approach [J].
Gómez-Moñivas, S ;
Sáenz, JJ ;
Carminati, R ;
Greffet, JJ .
APPLIED PHYSICS LETTERS, 2000, 76 (20) :2955-2957
[5]   Nanoscale capacitance microscopy of thin dielectric films [J].
Gomila, G. ;
Toset, J. ;
Fumagalli, L. .
JOURNAL OF APPLIED PHYSICS, 2008, 104 (02)
[6]   Tip-sample capacitance in capacitance microscopy of dielectric films [J].
Goto, K ;
Hane, K .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (08) :4043-4048
[7]   Dopant profiling on semiconducting sample by scanning capacitance force microscopy [J].
Kobayashi, K ;
Yamada, H ;
Matsushige, K .
APPLIED PHYSICS LETTERS, 2002, 81 (14) :2629-2631
[8]  
Lányi S, 1999, SURF INTERFACE ANAL, V27, P348, DOI 10.1002/(SICI)1096-9918(199905/06)27:5/6<348::AID-SIA514>3.0.CO
[9]  
2-O
[10]   Scanning capacitance microscopy for thin film measurements [J].
Lee, DT ;
Pelz, JP ;
Bhushan, B .
NANOTECHNOLOGY, 2006, 17 (05) :1484-1491