Use of sputtered zinc oxide film on aluminium foil substrate to produce a flexible and low profile ultrasonic transducer

被引：23

作者：

Hou, Ruozhou ^{[1
]}

Fu, Yong Qing ^{[1
]}

Hutson, David ^{[1
]}

Zhao, Chao ^{[1
]}

Gimenez, Esteban ^{[1
]}

Kirk, Katherine J. ^{[1
]}

机构：

[1] Univ West Scotland, Sch Engn & Comp, Paisley Campus, Paisley PA1 2BE, Renfrew, Scotland

来源：

ULTRASONICS | 2016年 / 68卷

基金：

英国工程与自然科学研究理事会;

关键词：

Zinc oxide; Thin film; DC sputtering; Flexible ultrasonic transducer; Non-destructive testing; ARRAYS; SENSOR;

D O I：

10.1016/j.ultras.2016.02.008

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A flexible and low profile ultrasonic transducer was fabricated for non-destructive testing (NDT) applications by DC sputtering of 3 lm thick, c-axis oriented, ZnO film on 50 lm aluminium foil. Due to the thin foil-based construction, the transducer can be applied to curved objects and used in sites of restricted accessibility. The device has been used to demonstrate detection of simulated defects in a 45 mm diameter steel pipe, and for thickness measurement on a 3.1 mm thick flat carbon steel plate. Centre frequency measured on the flat plate was 24-29 MHz, with -6 dB bandwidth 4-7 MHz. The pulse duration depended on the couplant, at best 3 cycles or 0.12 mu s using SONO Ultragel or epoxy couplant. Transducer performance was found to be comparable to a commercial 10 MHz piezoelectric ultrasonic transducer. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：54 / 60

页数：7

共 24 条

[11]

Hood J.P., 2011, THESIS U W SCOTLAND

[12] AlN thin film transducers for high temperature non-destructive testing applications [J].

Hou, Ruozhou ;

Hutson, David ;

Kirk, Katherine J. ;

Fu, Yong Qing .

JOURNAL OF APPLIED PHYSICS, 2012, 111 (07)

[13] Investigation of thin-film ultrasonic transducers for high-temperature applications [J].

Hou, Ruozhou ;

Hutson, D. ;

Kirk, K. J. .

INSIGHT, 2012, 54 (02) :68-71

[14]

Jen CK, 2006, ULTRASON, P1119

[15] Use of mass loading to operate a thin film ultrasonic transducer in the 300 kHz-10 MHz frequency range [J].

Kirk, Katherine J. ;

Elgoyhen, Jocelyn ;

Hood, John Paul ;

Hutson, David .

JOURNAL OF ELECTROCERAMICS, 2011, 27 (01) :29-32

[16]

Kobayashi M., 2006, P 4 INT WORKSH ULTR

[17] Flexible ultrasonic transducers [J].

Kobayashi, Makiko ;

Jen, Cheng-Kuei ;

Levesque, Daniel .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (08) :1478-1486

[18] Flexible ultrasonic transducer arrays for nondestructive evaluation applications .2. Performance assessment of different array configurations [J].

Powell, DJ ;

Hayward, G .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1996, 43 (03) :393-402

[19] LAMB WAVE DEVICES EMPLOYING ZNO-FILM AL-FOIL COMPOSITE STRUCTURE [J].

RAJENDRAN, V ;

KOIKE, M ;

HASHIMOTO, K ;

YAMAGUCHI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 :216-218

[20]

Rajendran V., 1991, T IEEE JAPAN C, V111, P433

← 1 2 3 →