Use of sputtered zinc oxide film on aluminium foil substrate to produce a flexible and low profile ultrasonic transducer

被引：23

作者：

Hou, Ruozhou ^{[1
]}

Fu, Yong Qing ^{[1
]}

Hutson, David ^{[1
]}

Zhao, Chao ^{[1
]}

Gimenez, Esteban ^{[1
]}

Kirk, Katherine J. ^{[1
]}

机构：

[1] Univ West Scotland, Sch Engn & Comp, Paisley Campus, Paisley PA1 2BE, Renfrew, Scotland

来源：

ULTRASONICS | 2016年 / 68卷

基金：

英国工程与自然科学研究理事会;

关键词：

Zinc oxide; Thin film; DC sputtering; Flexible ultrasonic transducer; Non-destructive testing; ARRAYS; SENSOR;

D O I：

10.1016/j.ultras.2016.02.008

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A flexible and low profile ultrasonic transducer was fabricated for non-destructive testing (NDT) applications by DC sputtering of 3 lm thick, c-axis oriented, ZnO film on 50 lm aluminium foil. Due to the thin foil-based construction, the transducer can be applied to curved objects and used in sites of restricted accessibility. The device has been used to demonstrate detection of simulated defects in a 45 mm diameter steel pipe, and for thickness measurement on a 3.1 mm thick flat carbon steel plate. Centre frequency measured on the flat plate was 24-29 MHz, with -6 dB bandwidth 4-7 MHz. The pulse duration depended on the couplant, at best 3 cycles or 0.12 mu s using SONO Ultragel or epoxy couplant. Transducer performance was found to be comparable to a commercial 10 MHz piezoelectric ultrasonic transducer. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：54 / 60

页数：7

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