Mechanical and surface properties of Ti-sputtered thin films

被引：4

作者：

Costanza, G. ^{[1
]}

Mercuri, F. ^{[1
]}

Tata, M. E. ^{[1
]}

机构：

[1] Univ Roma Tor Vergata, Dept Mech Engn, I-00133 Rome, Italy

来源：

INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING | 2008年 / 2卷 / 05期

关键词：

Al alloy; Al-MMC; Ti film; sputtering; mechanical properties; intrinsic hardness; surface roughness;

D O I：

10.1504/IJSURFSE.2008.021348

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The mechanical behaviour of the film and the thickness influence on the surface morphology have been studied in detail for Ti-sputtered coatings deposited at room temperature on AA6082 T6 and AA2618/20% Al2O3 flat samples. The intrinsic hardness and surface roughness of Ti thin films ranging from 0.5 mu m to 2 mu m have been investigated. The higher the coating thickness (up to 2 mu m), the lower the surface roughness and the higher the intrinsic hardness of the film. The improvement of surface roughness has been achieved by Ti-sputtered clusters able to cover the micro-valleys.

引用

页码：366 / 375

页数：10

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