Thin solid film sample preparation by a small-angle cleavage for transmission electron microscopy

被引：13

作者：

Suder, S

Faunce, CA

Donnelly, SE

机构：

[1] Joule Physics Laboratory, Science Research Institute, University of Salford

来源：

THIN SOLID FILMS | 1997年 / 304卷 / 1-2期

基金：

英国工程与自然科学研究理事会;

关键词：

thin solid films; cleavage; transmission electron microscopy;

D O I：

10.1016/S0040-6090(02)00042-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin solid film samples have been prepared by a small-angle cleavage technique using hand tools. Cleaved wedges from the same material are mounted both as plan-view and cross-sectional samples on the same transmission electron microscopy (TEM) specimen grid allowing convenient examination in both views. The samples of Si3N4, Zr and Co films deposited on Si prepared by this technique are shown to be suitable for analysis in TEM. (C) 1997 Published by Elsevier Science S.A.

引用

页码：157 / 159

页数：3